Difference between revisions of "DUV Flood Expose"

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{{tool|{{PAGENAME}}
+
<br />{{tool|{{PAGENAME}}
 
|picture=DUV.jpg
 
|picture=DUV.jpg
 
|type = Lithography
 
|type = Lithography
|super= Mike Silva
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|super= Lee Sawyer
|phone=(805)839-3918x219<br />
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|phone=(805)893-2123
|cell=(805)245-9356
 
 
|location=Bay 6
 
|location=Bay 6
|email=silva@ece.ucsb.edu
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|email=lee_sawyer@ucsb.edu
|description = Deep UV Flood Exposer / Light source and HA-1KC2 power supply
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|description = 1000W Deep UV Flood Exposure System (LS-150X-10C2) and Illumination Controller (2130-C2)
|manufacturer = AB Manufacturing
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|manufacturer = Bachur & Associates/AB Manufacturing
 
|materials =  
 
|materials =  
 
}}  
 
}}  
  
= About =
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==About==
 
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.
 
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.
  
 
Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.
 
Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.
  
=Detailed Specifications=
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==Detailed Specifications==
*DUV wavelengths are 200-260 nm; the lamp power is limited to either 1250 or 2100 watts and can operate in either constant intensity or constant power mode
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 +
*DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode
 
*The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
 
*The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
 
*Exposure can be performed on a 4" wafer
 
*Exposure can be performed on a 4" wafer
 
*Lamps are nominally rated for 400 hours
 
*Lamps are nominally rated for 400 hours
 
*A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation
 
*A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation
=Spectra Images=
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==Aligner with No Filter==
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==Spectra Images==
[[image:DUV-Spectra-No-Filter.png|thumb|none|600px|Aligner with No Filter]]
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==Aligner with Filter for i-line Exposure==
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===DUV Exposure System Spectra===
[[image:DUV-Spectra-With-Filter.png|thumb|none|600px|Aligner with Filter for i-line Exposure]]
 
==DUV Exposure System Spectra==
 
 
[[image:DUV-System-Spectra.png|thumb|none|600px|DUV Exposure System Spectra]]
 
[[image:DUV-System-Spectra.png|thumb|none|600px|DUV Exposure System Spectra]]
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 +
==Documentation==
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 +
*[https://signupmonkey.ece.ucsb.edu/wiki/images/2/27/DUV_Flood_Expose_SOP.pdf DUV Flood Expose Standard Operating Procedure]

Latest revision as of 15:27, 11 September 2019


DUV Flood Expose
DUV.jpg
Tool Type Lithography
Location Bay 6
Supervisor Lee Sawyer
Supervisor Phone (805) 893-2123
Supervisor E-Mail lee_sawyer@ucsb.edu
Description 1000W Deep UV Flood Exposure System (LS-150X-10C2) and Illumination Controller (2130-C2)
Manufacturer Bachur & Associates/AB Manufacturing



About

This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.

Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.

Detailed Specifications

  • DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode
  • The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
  • Exposure can be performed on a 4" wafer
  • Lamps are nominally rated for 400 hours
  • A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation

Spectra Images

DUV Exposure System Spectra

DUV Exposure System Spectra

Documentation