Difference between revisions of "DUV Flood Expose"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(System model and manufacturer info)
 
(2 intermediate revisions by one other user not shown)
Line 1: Line 1:
<nowiki>&lt;nowiki&gt;Insert non-formatted text here</nowiki><nowiki>&lt;nowiki&gt;Insert non-formatted text here</nowiki>&lt;/nowiki&gt;&lt;/nowiki&gt;{{tool|{{PAGENAME}}
+
<br />{{tool2|{{PAGENAME}}
 
|picture=DUV.jpg
 
|picture=DUV.jpg
 
|type = Lithography
 
|type = Lithography
 
|super= Lee Sawyer
 
|super= Lee Sawyer
 +
|super2= Bill Millerski
 
|phone=(805)893-2123
 
|phone=(805)893-2123
 
|location=Bay 6
 
|location=Bay 6
Line 11: Line 12:
 
}}  
 
}}  
  
= About =
+
==About==
 
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.
 
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.
  
 
Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.
 
Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.
  
=Detailed Specifications=
+
==Detailed Specifications==
 +
 
 
*DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode
 
*DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode
 
*The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
 
*The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
Line 22: Line 24:
 
*Lamps are nominally rated for 400 hours
 
*Lamps are nominally rated for 400 hours
 
*A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation
 
*A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation
=Spectra Images=
 
  
==DUV Exposure System Spectra==
+
==Spectra Images==
 +
 
 +
===DUV Exposure System Spectra===
 
[[image:DUV-System-Spectra.png|thumb|none|600px|DUV Exposure System Spectra]]
 
[[image:DUV-System-Spectra.png|thumb|none|600px|DUV Exposure System Spectra]]
 +
 +
==Documentation==
 +
 +
*[https://signupmonkey.ece.ucsb.edu/wiki/images/2/27/DUV_Flood_Expose_SOP.pdf DUV Flood Expose Standard Operating Procedure]

Latest revision as of 09:12, 30 August 2022


DUV Flood Expose
DUV.jpg
Location Bay 6
Tool Type Lithography
Manufacturer Bachur & Associates/AB Manufacturing
Description 1000W Deep UV Flood Exposure System (LS-150X-10C2) and Illumination Controller (2130-C2)

Primary Supervisor Lee Sawyer
(805) 893-2123
lee_sawyer@ucsb.edu

Secondary Supervisor

Bill Millerski


Recipes N/A


About

This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.

Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.

Detailed Specifications

  • DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode
  • The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
  • Exposure can be performed on a 4" wafer
  • Lamps are nominally rated for 400 hours
  • A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation

Spectra Images

DUV Exposure System Spectra

DUV Exposure System Spectra

Documentation