Difference between revisions of "DUV Flood Expose"
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|type = Lithography |
|type = Lithography |
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+ | ==About== |
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter. |
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter. |
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Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc. |
Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc. |
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| − | =Detailed Specifications= |
+ | ==Detailed Specifications== |
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*DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode |
*DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode |
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*The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample |
*The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample |
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*Lamps are nominally rated for 400 hours |
*Lamps are nominally rated for 400 hours |
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*A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation |
*A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation |
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[[image:DUV-System-Spectra.png|thumb|none|600px|DUV Exposure System Spectra]] |
[[image:DUV-System-Spectra.png|thumb|none|600px|DUV Exposure System Spectra]] |
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| + | ==Documentation== |
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| + | *[https://signupmonkey.ece.ucsb.edu/wiki/images/2/27/DUV_Flood_Expose_SOP.pdf DUV Flood Expose Standard Operating Procedure] |
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Revision as of 15:27, 11 September 2019
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About
This unit consists of a collimated deep ultraviolet (DUV) light source (mercury gas discharge short arc lamp) and power supply. The substrate is placed on a rotating chuck (not presently working) and is exposed by opening a timer-controlled shutter.
Materials that are exposed are primarily spun-on thin films such as PMMA, PMGI, etc.
Detailed Specifications
- DUV wavelengths are 200-260 nm; the lamp power is limited to 1000 watts and can operate in either constant intensity or constant power mode
- The full spectrum of Hg emission wavelengths from 200-450 nm is present on the sample
- Exposure can be performed on a 4" wafer
- Lamps are nominally rated for 400 hours
- A reset timer was added in Feb. 1995 to limit "on" time (ie. provide for auto shut-off) for bulb life conservation
