Difference between revisions of "Contact Alignment Recipes"

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[[category: Lithography]]
  
[[category: Lithography]]
   
−
= Notes =
 +
=Notes=
   
 
Below is a listing of contact lithography recipes for use with designated aligners.
 
Below is a listing of contact lithography recipes for use with designated aligners.
Line 14: Line 14:
 
Post develop bakes (not listed, aka. "hard bake") are used to make the resist more etch resistant and depend on subsequent processes. Unless otherwise noted, all exposures are done on silicon wafers.
 
Post develop bakes (not listed, aka. "hard bake") are used to make the resist more etch resistant and depend on subsequent processes. Unless otherwise noted, all exposures are done on silicon wafers.
   
−
= [[Suss Aligners (SUSS MJB-3)]] =
 +
=[[Suss Aligners (SUSS MJB-3)]]=
   
 
==Positive Resist (MJB-3)== <!--Note that if this heading is changed, the recipe links on the Lithography page must be changed-->
 
==Positive Resist (MJB-3)== <!--Note that if this heading is changed, the recipe links on the Lithography page must be changed-->
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{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
  
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
 
|- bgcolor="#D0E7FF"
  
|- bgcolor="#D0E7FF"
−
! width="100" | Resist
+
! width="100" |Resist
−
! width="100" | Spin Cond.
+
! width="100" |Spin Cond.
−
! width="100" | Bake
+
! width="100" |Bake
−
! width="100" | Thickness
+
! width="100" |Thickness
−
! width="125" | Exposure Time
+
! width="125" |Exposure Time
−
! width="100" | Developer
+
! width="100" |Developer
−
! width="125" | Developer Time
+
! width="125" |Developer Time
−
! width="300" | Comments
 +
! width="300" |Comments
 
|-
  
|-
  +
|[[Media:AXP4000pb-Datasheet.pdf|AZ4110]]
−
| AZ4110
 
−
| 4 krpm/30”
+
|4 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 1.1 um
+
|~ 1.1 um
−
| 8”
+
|8”
−
| AZ400K:DI 1:4
+
|AZ400K:DI 1:4
−
| 50"
+
|50"
−
| align="left" |
+
| align="left" |
 
|-
  
|-
  +
|[[Media:AXP4000pb-Datasheet.pdf|AZ4210]]
−
| AZ4210
 
−
| 4 krpm/30”
+
|4 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 2.1 um
+
|~ 2.1 um
−
| 13”
+
|13”
−
| AZ400K:DI 1:4
+
|AZ400K:DI 1:4
−
| 70”
+
|70”
−
| align="left" |
+
| align="left" |
 
|-
  
|-
  +
|[[Media:AXP4000pb-Datasheet.pdf|AZ4330]]
−
| AZ4330
 
−
| 4 krpm/30”
+
|4 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 3.3 um
+
|~ 3.3 um
−
| 18”
+
|18”
−
| AZ400K:DI 1:4
+
|AZ400K:DI 1:4
−
| 90”
+
|90”
−
| align="left" |
+
| align="left" |
 
|-
  
|-
  +
|[[Media:SPR220-Positive-Resist-Datasheet.pdf|SPR220-3.0]]
−
| SPR220-3.0
 
−
| 3.5 krpm/30”
+
|3.5 krpm/30”
−
| 115°C/90”
+
|115°C/90”
−
| ~ 2.5 um
+
|~ 2.5 um
−
| 25”
+
|25”
−
| AZ300MIF
+
|AZ300MIF
−
| 50”
+
|50”
−
| align="left" |
+
| align="left" |
−
*Post Bake 115°C /60”
+
*Post Bake 115°C /60”
−
*Better Cl2 etch resistance than 4330
+
*Better Cl2 etch resistance than 4330
 
*{{fl|SPR220-3contactrecipe.pdf|More Information}}
  
*{{fl|SPR220-3contactrecipe.pdf|More Information}}
   
 
|-
  
|-
  +
|[[Media:SPR220-Positive-Resist-Datasheet.pdf|SPR220-7.0]]
−
| SPR220-7.0
 
−
| 3.5 krpm/45”
+
|3.5 krpm/45”
−
| 115°C/120”
+
|115°C/120”
−
| ~ 7.5 um
+
|~ 7.5 um
−
| 60”
+
|60”
−
| AZ300MIF
+
|AZ300MIF
−
| 70”
+
|70”
−
| align="left" |
+
| align="left" |
 
*{{fl|SPR220-7contactrecipe.pdf|More Information}}
  
*{{fl|SPR220-7contactrecipe.pdf|More Information}}
   
Line 87: Line 87:
 
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
  
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
 
|- bgcolor="#D0E7FF"
  
|- bgcolor="#D0E7FF"
−
! width="100" | Resist
+
! width="100" |Resist
−
! width="100" | Spin Cond.
+
! width="100" |Spin Cond.
−
! width="100" | Bake
+
! width="100" |Bake
−
! width="100" | Thickness
+
! width="100" |Thickness
−
! width="125" | Exposure Time
+
! width="125" |Exposure Time
−
! width="100" | PEB
+
! width="100" |PEB
−
! width="100" | Flood
+
! width="100" |Flood
−
! width="125" | Developer
+
! width="125" |Developer
−
! width="125" | Developer Time
+
! width="125" |Developer Time
−
! width="350" | Comments
 +
! width="350" |Comments
 
|-
  
|-
  +
|[[Media:AZ5214-Negative-Resist-Datasheet.pdf|AZ5214]]
−
| AZ5214
 
−
| 6 krpm/30”
+
|6 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 1 um
+
|~ 1 um
−
| 5”
+
|5”
−
| 110°C/60”
+
|110°C/60”
−
| 60”
+
|60”
−
| AZ400K:DI 1:5.5 <br>or<br>AZ300MIF
+
|AZ400K:DI 1:5.5 <br>or<br>AZ300MIF
−
| 60"<br><br>45"
+
|60"<br><br>45"
−
| align="left" |
+
| align="left" |
 
*Concentrated 400K Dev. Etches 5214
  
*Concentrated 400K Dev. Etches 5214
   
 
|-
  
|-
  +
|[[Media:AZ5214-Negative-Resist-Datasheet.pdf|AZ5214]]
−
| AZ5214
 
−
| 6 krpm/30”
+
|6 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 1 um
+
|~ 1 um
−
| 10”
+
|10”
−
| 110°C/60”
+
|110°C/60”
−
| 60”
+
|60”
−
| AZ300MIF
+
|AZ300MIF
−
| 45”
+
|45”
−
| align="left" |
+
| align="left" |
 
*Using i-line filter in MJB-3. 0.7 um resolution possible
  
*Using i-line filter in MJB-3. 0.7 um resolution possible
   
 
|-
  
|-
  +
|[[Media:AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2020]]
−
| AZnLOF2020
 
−
| 3 krpm/30”
+
|3 krpm/30”
−
| 110°C/90”
+
|110°C/90”
−
| ~ 2.1 um
+
|~ 2.1 um
−
| 10”
+
|10”
−
| 110°C/60”
+
|110°C/60”
−
|
+
|
−
| AZ300MIF
+
|AZ300MIF
−
| 60”
+
|60”
−
| align="left" |
+
| align="left" |
−
*Use i-line filter
+
*Use i-line filter
−
*For Undercut
+
*For Undercut
 
*{{fl|AZnLOF2020contactrecipe.pdf|More Information}}
  
*{{fl|AZnLOF2020contactrecipe.pdf|More Information}}
   
 
|-
  
|-
−
| NR9-6000PY
+
|[[Media:NR9-6000PY-revA.pdf|NR9-6000PY]]
−
| 3 krpm/30”
+
|3 krpm/30”
−
| 140°C/180”
+
|140°C/180”
−
| ~ um
+
|~ um
−
| 30”
+
|30”
−
| 100°C/60”
+
|100°C/60”
−
|
+
|
−
| AZ300MIF
+
|AZ300MIF
−
| 30”
+
|30”
−
| align="left" |
+
| align="left" |
 
*Before litho, do Gasonics #3, 120"; Bake at 140 C, 5'
  
*Before litho, do Gasonics #3, 120"; Bake at 140 C, 5'
 
*Spin-on HMDS 3krpm 30", prior to NR9-6000PY
  
*Spin-on HMDS 3krpm 30", prior to NR9-6000PY
Line 154: Line 154:
 
|}
  
|}
   
−
= [[Contact Aligner (SUSS MA-6)]] =
 +
=[[Contact Aligner (SUSS MA-6)]]=
   
 
==Positive Resist (MA-6)== <!--Note that if this heading is changed, the recipe links on the Lithography page must be changed-->
 
==Positive Resist (MA-6)== <!--Note that if this heading is changed, the recipe links on the Lithography page must be changed-->
Line 163: Line 163:
 
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
  
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
 
|- bgcolor="#D0E7FF"
  
|- bgcolor="#D0E7FF"
−
! width="100" | Resist
+
! width="100" |Resist
−
! width="100" | Spin Cond.
+
! width="100" |Spin Cond.
−
! width="100" | Bake
+
! width="100" |Bake
−
! width="100" | Thickness
+
! width="100" |Thickness
−
! width="125" | Exposure Time
+
! width="125" |Exposure Time
−
! width="100" | Developer
+
! width="100" |Developer
−
! width="125" | Developer Time
+
! width="125" |Developer Time
−
! width="300" | Comments
 +
! width="300" |Comments
 
|-
  
|-
  +
|[[Media:AXP4000pb-Datasheet.pdf|AZ4110]]
−
| AZ4110
 
−
| 4 krpm/30”
+
|4 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 1.1 um
+
|~ 1.1 um
−
| 3.3”
+
|3.3”
−
| AZ400K:DI 1:4
+
|AZ400K:DI 1:4
−
| 50"
+
|50"
−
| align="left" |
+
| align="left" |
 
|-
  
|-
  +
|[[Media:AXP4000pb-Datasheet.pdf|AZ4210]]
−
| AZ4210
 
−
| 4 krpm/30”
+
|4 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 2.1 um
+
|~ 2.1 um
−
| 5.4”
+
|5.4”
−
| AZ400K:DI 1:4
+
|AZ400K:DI 1:4
−
| 70”
+
|70”
−
| align="left" |
+
| align="left" |
 
|-
  
|-
  +
|[[Media:AXP4000pb-Datasheet.pdf|AZ4330]]
−
| AZ4330
 
−
| 4 krpm/30”
+
|4 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 3.3 um
+
|~ 3.3 um
−
| 7.5”
+
|7.5”
−
| AZ400K:DI 1:4
+
|AZ400K:DI 1:4
−
| 90”
+
|90”
−
| align="left" |
+
| align="left" |
 
|-
  
|-
−
| SPR955CM-0.9
+
|[[Media:SPR955-Positive-Resist-Datasheet.pdf|SPR955CM-0.9]]
−
| 3 krpm/30”
+
|3 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 0.9 um
 +
|~ 0.9 um
−
| 8”
+
|8”
−
| AZ300MIF
+
|AZ300MIF
−
| 70”
+
|70”
−
| align="left" |
+
| align="left" |
−
*Post Exposure Bake 110°C /60”
+
*Post Exposure Bake 110°C /60”
 
|-
  
|-
  +
|[[Media:SPR220-Positive-Resist-Datasheet.pdf|SPR220-3.0]]
−
| SPR220-3.0
 
−
| 3.5 krpm/30”
+
|3.5 krpm/30”
−
| 115°C/90”
+
|115°C/90”
−
| ~ 2.5 um
+
|~ 2.5 um
−
| 10.4”
+
|10.4”
−
| AZ300MIF
+
|AZ300MIF
−
| 50”
+
|50”
−
| align="left" |
+
| align="left" |
−
*Post Bake 115°C /60”
+
*Post Bake 115°C /60”
 
*Better Cl2 etch resistance than 4330
  
*Better Cl2 etch resistance than 4330
   
 
|-
  
|-
  +
|[[Media:SPR220-Positive-Resist-Datasheet.pdf|SPR220-7.0]]
−
| SPR220-7.0
 
−
| 3.5 krpm/45”
+
|3.5 krpm/45”
−
| 115°C/120”
+
|115°C/120”
−
| ~ 7.5 um
+
|~ 7.5 um
−
| 25”
+
|25”
−
| AZ300MIF
+
|AZ300MIF
−
| 70”
+
|70”
−
| align="left" |
+
| align="left" |
 
|}
  
|}
   
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{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
  
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" border="1"
 
|- bgcolor="#D0E7FF"
  
|- bgcolor="#D0E7FF"
−
! width="100" | Resist
+
! width="100" |Resist
−
! width="100" | Spin Cond.
+
! width="100" |Spin Cond.
−
! width="100" | Bake
+
! width="100" |Bake
−
! width="100" | Thickness
+
! width="100" |Thickness
−
! width="125" | Exposure Time
+
! width="125" |Exposure Time
−
! width="100" | PEB
+
! width="100" |PEB
−
! width="100" | Flood Exposure
+
! width="100" |Flood Exposure
−
! width="125" | Developer
+
! width="125" |Developer
−
! width="125" | Developer Time
+
! width="125" |Developer Time
−
! width="350" | Comments
 +
! width="350" |Comments
 
|-
  
|-
  +
|[[Media:AZ5214-Negative-Resist-Datasheet.pdf|AZ5214]]
−
| AZ5214
 
−
| 6 krpm/30”
+
|6 krpm/30”
−
| 95°C/60”
+
|95°C/60”
−
| ~ 1 um
+
|~ 1 um
−
| 2.1”
+
|2.1”
−
| 110°C/60”
+
|110°C/60”
−
| 30"
+
|30"
−
| AZ400K:DI 1:5.5 <br>or<br>AZ300MIF
+
|AZ400K:DI 1:5.5 <br>or<br>AZ300MIF
−
| 60"<br><br>45"
+
|60"<br><br>45"
−
| align="left" |
+
| align="left" |
 
*Concentrated (undiluted) 400K Dev. Etches 5214
  
*Concentrated (undiluted) 400K Dev. Etches 5214
   
 
|-
  
|-
  +
|[[Media:AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2020]]
−
| AZnLOF2020
 
−
| 3 krpm/30”
+
|3 krpm/30”
−
| 110°C/90”
+
|110°C/90”
−
| ~ 2.1 um
+
|~ 2.1 um
−
| 4.2”
+
|4.2”
−
| 110°C/60”
+
|110°C/60”
−
|
+
|
−
| AZ300MIF
+
|AZ300MIF
−
| 60”
+
|60”
−
| align="left" |
+
| align="left" |
 
*For Undercut
  
*For Undercut
   
 
|-
  
|-
  +
|[[Media:AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2035]]
−
| AZnLOF2035
 
−
| 2.5 krpm/30”
+
|2.5 krpm/30”
−
| 110°C/60”
+
|110°C/60”
−
| ~ 3.5 um
+
|~ 3.5 um
−
| 5.0”
+
|5.0”
−
| 110°C/60”
+
|110°C/60”
−
|
+
|
−
| AZ300MIF
+
|AZ300MIF
−
| 70”
 +
|70”
−
| align="left" |
+
| align="left" |
 
*For Undercut
  
*For Undercut
   
 
|-
  
|-
−
| NR9-6000PY
+
|[[Media:NR9-6000PY-revA.pdf|NR9-6000PY]]
−
| 3 krpm/30”
+
|3 krpm/30”
−
| 140°C/180”
+
|140°C/180”
−
| ~ um
+
|~ um
−
| 13.1”
+
|13.1”
−
| 100°C/60”
+
|100°C/60”
−
|
+
|
−
| AZ300MIF
+
|AZ300MIF
−
| 30”
+
|30”
−
| align="left" |
+
| align="left" |
 
*Before litho, do Gasonics #3, 120"; Bake at 140 C, 5'
  
*Before litho, do Gasonics #3, 120"; Bake at 140 C, 5'
 
*Spin-on HMDS 3krpm 30", prior to NR9-6000PY
  
*Spin-on HMDS 3krpm 30", prior to NR9-6000PY
   
 
|}
  
|}
  +
 
*[//wiki.nanotech.ucsb.edu/w/images/1/1e/47-Photolithography_of_SU8-2005.pdf SU-8-2005 Recipe]
  
*[//wiki.nanotech.ucsb.edu/w/images/1/1e/47-Photolithography_of_SU8-2005.pdf SU-8-2005 Recipe]
 
*[//wiki.nanotech.ucsb.edu/w/images/b/bb/48-Photolithography_of_SU8-2010.pdf SU-8-2010 Recipe]
  
*[//wiki.nanotech.ucsb.edu/w/images/b/bb/48-Photolithography_of_SU8-2010.pdf SU-8-2010 Recipe]

Latest revision as of 12:20, 1 December 2022

Back to Lithography Recipes.

Notes

Below is a listing of contact lithography recipes for use with designated aligners.

Based on your sample reflectivity, absorption, and surface topography the exposure time parameters may vary. This listing is a guideline to get you started.

For best resolution using thin resists, you will need to remove any edge bead before contact and exposure. This can be done with a razor blade (not for brittle substrates), or EBR-100 on a cotton swab (wipe off excess liquid before using), or lithgraphically with a tin-foil mask, flood exposure and develop.

Also, hard contact mode will give you the most intimate contact between sample and mask, giving the best resolution. However for flat unpatterned substrates, this can cause wafers to stick to the mask plate.

Post develop bakes (not listed, aka. "hard bake") are used to make the resist more etch resistant and depend on subsequent processes. Unless otherwise noted, all exposures are done on silicon wafers.

Suss Aligners (SUSS MJB-3)

Positive Resist (MJB-3)

Unless otherwise noted, bakes are on hot plates and the exposure of the resist is done using no filtering at 7.0 mW/cm2. Only Channel @2 is used/calibrated. Power of the lamp is set using the 405 nm (h-line) detector.

Resist Spin Cond. Bake Thickness Exposure Time Developer Developer Time Comments
AZ4110 4 krpm/30” 95°C/60” ~ 1.1 um 8” AZ400K:DI 1:4 50"
AZ4210 4 krpm/30” 95°C/60” ~ 2.1 um 13” AZ400K:DI 1:4 70”
AZ4330 4 krpm/30” 95°C/60” ~ 3.3 um 18” AZ400K:DI 1:4 90”
SPR220-3.0 3.5 krpm/30” 115°C/90” ~ 2.5 um 25” AZ300MIF 50”
SPR220-7.0 3.5 krpm/45” 115°C/120” ~ 7.5 um 60” AZ300MIF 70”

Negative Resist (MJB-3)

Unless otherwise noted, bakes are on hot plates and the exposure of the resist is done using no filtering at 7.0 mW/cm2. Power of the lamp is set using the 405 nm (h-line) detector. In general, many negative resists require post-exposure-bakes (PEB) / flood exposures in order to make the negative tone of the image. All flood exposures are done in broadband light using any contact aligner. Also, because the tone is negative, a shorter first exposure time will result in more undercut, which is desirable for single-layer lift-off processes. Under these conditions more develop time will also give more undercut.

Resist Spin Cond. Bake Thickness Exposure Time PEB Flood Developer Developer Time Comments
AZ5214 6 krpm/30” 95°C/60” ~ 1 um 5” 110°C/60” 60” AZ400K:DI 1:5.5
or
AZ300MIF 		60"

45"
  • Concentrated 400K Dev. Etches 5214
AZ5214 6 krpm/30” 95°C/60” ~ 1 um 10” 110°C/60” 60” AZ300MIF 45”
  • Using i-line filter in MJB-3. 0.7 um resolution possible
AZnLOF2020 3 krpm/30” 110°C/90” ~ 2.1 um 10” 110°C/60” AZ300MIF 60”
NR9-6000PY 3 krpm/30” 140°C/180” ~ um 30” 100°C/60” AZ300MIF 30”
  • Before litho, do Gasonics #3, 120"; Bake at 140 C, 5'
  • Spin-on HMDS 3krpm 30", prior to NR9-6000PY

Contact Aligner (SUSS MA-6)

Positive Resist (MA-6)

Unless otherwise noted, bakes are on hot plates and the exposure of the resist is done using no filtering at 9 mW/cm2 (Channel 1). Power of the lamp is set using the 365 nm (i-line) detector. For reference, this would equate to 17.5 mW/cm² when measured with a 405 nm (h-line) detector.

For the MA-6 aligner, using Channel 1, the exposure times given below are the same as the MJB-3 except they have been reduced by a factor of 2.4.

Resist Spin Cond. Bake Thickness Exposure Time Developer Developer Time Comments
AZ4110 4 krpm/30” 95°C/60” ~ 1.1 um 3.3” AZ400K:DI 1:4 50"
AZ4210 4 krpm/30” 95°C/60” ~ 2.1 um 5.4” AZ400K:DI 1:4 70”
AZ4330 4 krpm/30” 95°C/60” ~ 3.3 um 7.5” AZ400K:DI 1:4 90”
SPR955CM-0.9 3 krpm/30” 95°C/60” ~ 0.9 um 8” AZ300MIF 70”
  • Post Exposure Bake 110°C /60”
SPR220-3.0 3.5 krpm/30” 115°C/90” ~ 2.5 um 10.4” AZ300MIF 50”
  • Post Bake 115°C /60”
  • Better Cl2 etch resistance than 4330
SPR220-7.0 3.5 krpm/45” 115°C/120” ~ 7.5 um 25” AZ300MIF 70”

Negative Resist (MA-6)

Unless otherwise noted, bakes are on hot plates and the exposure of the resist is done using no filtering at 9 mW/cm2 (Channel 1). Power of the lamp is set using the 365 nm (i-line) detector. For reference, this would equate to 17.5 mW/cm² when measured with a 405 nm (h-line) detector.

In general, many negative resists require post-exposure-bakes (PEB) / flood exposures in order to make the negative tone of the image. All flood exposures are done in broadband light using any contact aligner. Also, because the tone is negative, a shorter first exposure time will result in more undercut, which is desirable for single-layer lift-off processes. Under these conditions more develop time will also give more undercut. For the MA-6 aligner, using Channel 1, the exposure times given below are the same as the MJB-3 except they have been reduced by a factor of 2.4.

Resist Spin Cond. Bake Thickness Exposure Time PEB Flood Exposure Developer Developer Time Comments
AZ5214 6 krpm/30” 95°C/60” ~ 1 um 2.1” 110°C/60” 30" AZ400K:DI 1:5.5
or
AZ300MIF 		60"

45"
  • Concentrated (undiluted) 400K Dev. Etches 5214
AZnLOF2020 3 krpm/30” 110°C/90” ~ 2.1 um 4.2” 110°C/60” AZ300MIF 60”
  • For Undercut
AZnLOF2035 2.5 krpm/30” 110°C/60” ~ 3.5 um 5.0” 110°C/60” AZ300MIF 70”
  • For Undercut
NR9-6000PY 3 krpm/30” 140°C/180” ~ um 13.1” 100°C/60” AZ300MIF 30”
  • Before litho, do Gasonics #3, 120"; Bake at 140 C, 5'
  • Spin-on HMDS 3krpm 30", prior to NR9-6000PY
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