Difference between revisions of "Chemical List - OLD 2018-09-05"

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Below is a list of all chemicals authorized for use in the lab. Please note that only the chemicals that appear in '''bold''' are stocked by the lab. All other chemicals have been authorized for users to bring.
+
Below is a list of all chemicals authorized for use in the lab & links to the corresponding Material Safety Data Sheets (MSDS).
  +
  +
Only the chemicals that appear in '''bold''' are stocked by the lab for general use. All other listed chemicals have been authorized for individual users/companies to bring in for their own use.
  +
  +
MSDS sheets can be used to determine the concentrations and constituents of a particular chemical, in addition to safety, handling and emergency/exposure information. Please take time to look at the MSDS of the chemicals you use!
 
=Acids=
  
=Acids=
 
{|
  
{|
−
|-valign="top"
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|- valign="top"
−
|width=300|
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| width="300" |
 
*'''[[media:Acetic Acid MSDS.pdf|Acetic Acid MSDS]]'''
  
*'''[[media:Acetic Acid MSDS.pdf|Acetic Acid MSDS]]'''
 
*'''[[media:Al Etchant, Type A MSDS.pdf|Al Etchant, Type A MSDS]]'''
  
*'''[[media:Al Etchant, Type A MSDS.pdf|Al Etchant, Type A MSDS]]'''
 
*'''[[media:Al Etchant, Type D MSDS.pdf|Al Etchant, Type D MSDS]]'''
  
*'''[[media:Al Etchant, Type D MSDS.pdf|Al Etchant, Type D MSDS]]'''
 
*[[media:BoricAcidMSDS.pdf|Boric Acid MSDS]]
  
*[[media:BoricAcidMSDS.pdf|Boric Acid MSDS]]
−
*'''[[media:Buffered HF.pdf|Buffered HF MSDS]]
 +
*'''[[media:Buffered HF.pdf|Buffered HF MSDS]]'''
 
*'''[[media:Chromic Acid.pdf|Chromic Acid MSDS]]'''
  
*'''[[media:Chromic Acid.pdf|Chromic Acid MSDS]]'''
−
*'''[[media:ChromiumMaskEtchantMSDS.pdf|Chromium Mask Etchant MSDS]]
 +
*'''[[media:ChromiumMaskEtchantMSDS.pdf|Chromium Mask Etchant MSDS]] "1020"'''
−
*'''[[media:CitricAcidMSDS.pdf|Citric Acid (granular) MSDS]]
 +
*'''[[media:CitricAcidMSDS.pdf|Citric Acid (granular) MSDS]]'''
 
*[[media:FormicAcidMSDS.pdf|Formic Acid 88% MSDS]]
  
*[[media:FormicAcidMSDS.pdf|Formic Acid 88% MSDS]]
−
*'''[[media:HydrobromicAcidMSDS.pdf|Hydrobromic Acid MSDS]]
 +
*'''[[media:HydrobromicAcidMSDS.pdf|Hydrobromic Acid MSDS]]'''
 
*'''[[media:HydrochloricAcidMSDS.pdf|Hydrochloric Acid MSDS]]'''
  
*'''[[media:HydrochloricAcidMSDS.pdf|Hydrochloric Acid MSDS]]'''
−
*'''[[media:HydrofluoricAcidMSDS.pdf|Hydrofluoric Acid 49% MSDS]]
 +
*'''[[media:HydrofluoricAcidMSDS.pdf|Hydrofluoric Acid 49% MSDS]]'''
 
*[[media:HydroiodicAcidMSDS.pdf|Hydroiodic Acid 47% MSDS]]
  
*[[media:HydroiodicAcidMSDS.pdf|Hydroiodic Acid 47% MSDS]]
−
|width=300|
  
 
*[[media:LacticAcidFractionalMSDS.pdf|Lactic Acid 0.1 Normal Volumetric MSDS]]
  
*[[media:LacticAcidFractionalMSDS.pdf|Lactic Acid 0.1 Normal Volumetric MSDS]]
  +
| width="300" |
 
*[[media:LacticAcidMSDS.pdf|Lactic Acid MSDS]]
  
*[[media:LacticAcidMSDS.pdf|Lactic Acid MSDS]]
 
*[[media:MethacrylicAcidMSDS.pdf|Methacrylic Acid MSDS]]
  
*[[media:MethacrylicAcidMSDS.pdf|Methacrylic Acid MSDS]]
−
*'''[[media:NickelEtchantTFBMSDS.pdf|Nickel Etchant, Type TFB MSDS]]
 +
*'''[[media:NickelEtchantTFBMSDS.pdf|Nickel Etchant, Type TFB MSDS]]'''
−
*'''[[media:NitricAcidMSDS.pdf|Nitric Acid MSDS]]
 +
*'''[[media:NitricAcidMSDS.pdf|Nitric Acid MSDS]]'''
 
*[[media:OxalicAcidDihydrateMSDS.pdf|Oxalic Acid Dihydrate MSDS]]
  
*[[media:OxalicAcidDihydrateMSDS.pdf|Oxalic Acid Dihydrate MSDS]]
−
*'''[[media:PhosphoricAcidMSDS.pdf|Phosphoric Acid MSDS]]
 +
*'''[[media:PhosphoricAcidMSDS.pdf|Phosphoric Acid MSDS]]'''
 
*[[media:SelenousAcidMSDS.pdf|Selenous Acid MSDS]]
  
*[[media:SelenousAcidMSDS.pdf|Selenous Acid MSDS]]
−
*'''[[media:SulfuricAcidMSDS.pdf|Sulfuric Acid MSDS]]
 +
*[[media:SuccinicAcid99%MSDS.pdf|Succinic Acid 99% MSDS]]
−
*'''[[media:TiEtchantMSDS.pdf|Ti Etchant, Type TFTN MSDS]]
 +
*[[media:SulfamicAcidMSDS.pdf|Sulfamic Acid MSDS]]
  +
*[[media:SulfuricAcid93%MSDS.pdf|Sulfuric Acid 93% MSDS]]
  +
*[[media:SulfuricAcidFuming.pdf|Sulfuric Acid Fuming MSDS]]
  +
*'''[[media:SulfuricAcidMSDS.pdf|Sulfuric Acid MSDS]]'''
  +
*[[media:TartaricAcidMSDS.pdf|Tartaric Acid MSDS]]
  +
*'''[[media:TiEtchantMSDS.pdf|Ti Etchant, Type TFTN MSDS]]'''
 
|-
  
|-
 
|}
  
|}
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=Bases=
  
=Bases=
 
{|
  
{|
−
|-valign="top"
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|- valign="top"
−
|width=300|
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| width="300" |
−
*'''[[media:AmmoniumHydroxideMSDS.pdf|Ammonium Hydroxide MSDS]]
 +
*'''[[media:AmmoniumHydroxideMSDS.pdf|Ammonium Hydroxide MSDS]]'''
−
*'''[[media:AmmoniumSulfideMSDS.pdf|Ammonium Sulfide MSDS]]
 +
*'''[[media:AmmoniumSulfideMSDS.pdf|Ammonium Sulfide MSDS]]'''
−
*'''[[media:PotassiumHydroxideMSDS.pdf|Potassium Hydroxide MSDS]]
 +
*'''[[media:PotassiumHydroxideMSDS.pdf|Potassium Hydroxide MSDS]]'''
−
*'''[[media:SodiumHydroxideMSDS.pdf|Sodium Hydroxide MSDS]]
 +
*'''[[media:SodiumHydroxideMSDS.pdf|Sodium Hydroxide MSDS]]'''
−
|width=300|
 +
| width="300" |
−
*'''[[media:SodiumSulfideMSDS.pdf|Sodium Sulfide MSDS]]
 +
*'''[[media:SodiumSulfideMSDS.pdf|Sodium Sulfide MSDS]]'''
−
*'''[[media:THAH25MSDS1.pdf|TMAH 25% MSDS #1]]
 +
*'''[[media:THAH25MSDS1.pdf|TMAH 25% MSDS #1]]'''
−
*'''[[media:THAH25MSDS2.pdf|TMAH 25% MSDS #2]]
 +
*'''[[media:THAH25MSDS2.pdf|TMAH 25% MSDS #2]]'''
 
|-
  
|-
 
|}
  
|}
   
 
=Lithography Chemicals=
  
=Lithography Chemicals=
  +
Please see the [https://wiki.nanotech.ucsb.edu/w/index.php?title=Lithography_Recipes#Chemical_Datasheets Recipes > Lithography > Chemical Datasheets]page for the datasheets, which include starting parameters for your fabrication processes.
−
{| class="wikitable" style="font-size: 95%;" border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%"
  
  +
{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1"
−
|-bgcolor=#D0E7FF
  
−
!align=center bgcolor=#D0E7FF width="250"|'''Chemical'''
 +
|- bgcolor="#D0E7FF"
−
!align=center bgcolor=#D0E7FF width="250"|'''MSDS'''
 +
! align="center" bgcolor="#D0E7FF" width="250" |'''Chemical'''
−
!align=center bgcolor=#D0E7FF width="150"|'''Datasheet'''
 +
! align="center" bgcolor="#D0E7FF" width="250" |'''MSDS'''
  +
! align="center" bgcolor="#D0E7FF" width="150" |'''Datasheet'''
 
|-
  
|-
−
|'''1165 Stripper||[[media:1165 Stripper MSDS.pdf|1165 Stripper MSDS]]||[[media:1165 Stripper Datasheet.pdf|1165 Stripper Datasheet]]
 +
|1165 Stripper||[[media:1165 Stripper MSDS.pdf|1165 Stripper MSDS]]||[[media:1165 Stripper Datasheet.pdf|1165 Stripper Datasheet]]
 
|-
  
|-
−
|'''Accuglass T-12B||[[media:AccuglassT-12B-MSDS.pdf|Accuglass T-12B MSDS]] ||
 +
|'''Accuglass T-12B'''||[[media:AccuglassT-12B-MSDS.pdf|Accuglass T-12B MSDS]] ||
 
|-
  
|-
−
|'''AP 3000 Adhesion Promoter||[[media:AP-3000-Adhesion-MSDS.pdf|AP 3000 Adhesion Promoter]] ||
 +
|'''AP 3000 Adhesion Promoter'''||[[media:AP-3000-Adhesion-MSDS.pdf|AP 3000 Adhesion Promoter]] ||
 
|-
  
|-
−
|AZ 300 MIF Developer|| ||
 +
|'''AZ 300 MIF Developer'''|| ||
 
|-
  
|-
 
|AZ 300T Stripper|| ||
  
|AZ 300T Stripper|| ||
 
|-
  
|-
−
|AZ 400K Developer|| ||
 +
|'''AZ 400K Developer'''|| ||
 
|-
  
|-
−
|AZ726 MIF Developer|| ||
 +
|'''AZ 726 MIF Developer'''|| ||
 
|-
  
|-
−
|AZ EBR Edge Bead Remover|| ||
 +
|'''AZ EBR Edge Bead Remover'''|| ||
 
|-
  
|-
 
|AZ LOL 2000 Photoresist|| ||
  
|AZ LOL 2000 Photoresist|| ||
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|AZ nLOF 5510 Photoresist|| ||
  
|AZ nLOF 5510 Photoresist|| ||
 
|-
  
|-
  +
|'''AZ NMP Stripper'''
−
|AZ P4110 Photoresist|| ||
  
  +
|[https://wiki.nanotech.ucsb.edu/w/index.php?title=Media:AZ_NMP_RINSE_MSDS.pdf AZ NMP RINSE]
  +
|[https://www.microchemicals.com/products/remover_stripper/nmp.html NMP Docs on MicroChem]
 
|-
  
|-
−
|AZ P4210 Photoresist|| ||
 +
|'''AZ P4110 Photoresist'''|| ||
 
|-
  
|-
−
|AZ P4330 RS Photoresist|| ||
 +
|'''AZ P4210 Photoresist'''|| ||
 
|-
  
|-
−
|AZ P5214 EIR Photoresist|| ||
 +
|'''AZ P4330 RS Photoresist'''|| ||
  +
|-
  +
|'''AZ P5214 EIR Photoresist'''|| ||
 
|-
  
|-
 
|CEM 365 IS|| ||
  
|CEM 365 IS|| ||
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|DS 2100 VCS Developer|| ||
  
|DS 2100 VCS Developer|| ||
 
|-
  
|-
−
|HMDS|| ||
 +
|'''HMDS'''|| ||
 
|-
  
|-
 
|ma-N 2403 Photoresist|| ||
  
|ma-N 2403 Photoresist|| ||
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|S1805 Photoresist|| ||
  
|S1805 Photoresist|| ||
 
|-
  
|-
−
|SPR 220 Photoresist|| ||
 +
|'''SPR 220 Photoresist'''|| ||
 
|-
  
|-
 
|SPR 510A Photoresist|| ||
  
|SPR 510A Photoresist|| ||
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|SPR 950-0.8 Photoresist|| ||
  
|SPR 950-0.8 Photoresist|| ||
 
|-
  
|-
−
|SPR 955 CM|| ||
 +
|'''SPR 955 CM'''|| ||
 
|-
  
|-
 
|SVC-14 Stripper|| ||
  
|SVC-14 Stripper|| ||
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=Solvents=
  
=Solvents=
 
{|
  
{|
−
|-valign="top"
 +
|- valign="top"
−
|width=300|
 +
| width="300" |
−
*'''[[media:AcetoneMSDS.pdf|Acetone MSDS]]
 +
*'''[[media:AcetoneMSDS.pdf|Acetone MSDS]]'''
−
*'''[[media:AmylAcetateMSDS.pdf|Amyl Acetate MSDS]]
 +
*'''[[media:AmylAcetateMSDS.pdf|Amyl Acetate MSDS]]'''
−
*'''[[media:EthylAlcoholMSDS.pdf|Ethyl Alcohol (Ethanol) MSDS]]
 +
*'''[[media:EthylAlcoholMSDS.pdf|Ethyl Alcohol (Ethanol) MSDS]]'''
−
*'''[[media:EthyleneGlycolMSDS.pdf|Ethylene Glycol MSDS]]
 +
*'''[[media:EthyleneGlycolMSDS.pdf|Ethylene Glycol MSDS]]'''
−
*'''[[media:MethylAlcoholMSDS.pdf|Methyl Alcohol (Methanol) MSDS]]
 +
*'''[[media:MethylAlcoholMSDS.pdf|Methyl Alcohol (Methanol) MSDS]]'''
−
|width=300|
 +
| width="300" |
−
*'''[[media:MethylEthylKetoneMSDS.pdf|Methyl Ethyl Ketone MSDS]]
 +
*'''[[media:MethylEthylKetoneMSDS.pdf|Methyl Ethyl Ketone MSDS]]'''
−
*'''[[media:MethylIsobutylKetoneMSDS.pdf|Methyl Isobutyl Ketone (MIBK) MSDS]]
 +
*'''[[media:MethylIsobutylKetoneMSDS.pdf|Methyl Isobutyl Ketone (MIBK) MSDS]]'''
−
*'''[[media:PropanolMSDS.pdf|Propanol MSDS]]
 +
*'''[[media:PropanolMSDS.pdf|Propanol MSDS]]'''
−
*'''[[media:TolueneMSDS.pdf|Toluene MSDS]]
 +
*'''[[media:TolueneMSDS.pdf|Toluene MSDS]]'''
−
*'''[[media:XylenesMSDS.pdf|Xylenes MSDS]]
 +
*'''[[media:XylenesMSDS.pdf|Xylenes MSDS]]'''
 
|-
  
|-
 
|}
  
|}
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=Other Chemicals=
  
=Other Chemicals=
 
{|
  
{|
−
|-valign="top"
 +
|- valign="top"
−
|width=300|
 +
| width="300" |
−
*'''[[media:AmmoniumSulfideMSDS.pdf|Ammonium Sulfide MSDS]]
 +
*'''[[media:AmmoniumSulfideMSDS.pdf|Ammonium Sulfide MSDS]]'''
−
*'''[[media:Crystalbond509MSDS.pdf|Crystalbond 509 MSDS]]
 +
*'''[[media:Crystalbond509MSDS.pdf|Crystalbond 509 MSDS]]'''
−
*'''[[media:GenSolve500MSDS.pdf|GenSolve 500 MSDS]]
 +
*'''[[media:GenSolve500MSDS.pdf|GenSolve 500 MSDS]]'''
−
*'''[[media:GenTak230MSDS.pdf|GenTak 230 MSDS]]
 +
*'''[[media:GenTak230MSDS.pdf|GenTak 230 MSDS]]'''
−
*'''[[media:GoldEtchantTypeTFAMSDS.pdf|Gold Etchant, Type TFA MSDS]]
 +
*'''[[media:GoldEtchantTypeTFAMSDS.pdf|Gold Etchant, Type TFA MSDS]]'''
−
*'''[[media:HydrogenPeroxideMSDS.pdf|Hydrogen Peroxide MSDS]]
 +
*'''[[media:HydrogenPeroxideMSDS.pdf|Hydrogen Peroxide (30% dilute) MSDS]]'''
−
|width=300|
 +
| width="300" |
−
*'''[[media:NickelEtchantTFBMSDS.pdf|Nickel Etchant Type TFB MSDS]]
 +
*'''[[media:NickelEtchantTFBMSDS.pdf|Nickel Etchant Type TFB MSDS]]'''
−
*'''[[media:PC3-1500SpinOnGlassMSDS.pdf|PC3-1500 Spin-On-Glass MSDS]]
 +
*'''[[media:PC3-1500SpinOnGlassMSDS.pdf|PC3-1500 Spin-On-Glass MSDS]]'''
−
*'''[[media:SaturatedBromineWaterMSDS.pdf|Saturated Bromine Water MSDS]]
 +
*'''[[media:SaturatedBromineWaterMSDS.pdf|Saturated Bromine Water MSDS]]'''
−
*'''[[media:SilverEtchantTypeTFS.pdf|Silver Etchant Type TFS MSDS]]
 +
*'''[[media:SilverEtchantTypeTFS.pdf|Silver Etchant Type TFS MSDS]]'''
−
*'''[[media:Technic25ESGoldPlatingSolution.pdf|Technic 25 ES Gold Plating Solution MSDS]]
 +
*'''[[media:Technic25ESGoldPlatingSolution.pdf|Technic 25 ES Gold Plating Solution MSDS]]'''
  +
*'''[[media:KJL 705 pump oil.pdf|Kurt J Lesker 705 pump oil MSDS]]'''
 
|-
  
|-
 
|}
  
|}
  +
  +
==UNSORTED==
  +
{|
  +
|- valign="top"
  +
| width="300" |
  +
*[[media:DN-201GP-Photoresist-MSDS.pdf|DN-201 GP Photoresist MSDS]]
  +
*[[media:(4-Methylthiophenyl)methyl phenyl sulfonium triflate MSDS.pdf|(4-Methylthiophenyl)methyl phenyl sulfonium triflate MSDS]]
  +
*[[media:(4-Phenylthiophenyl)diphenylsulfonium triflate MSDS.pdf|(4-Phenylthiophenyl)diphenylsulfonium triflate MSDS]]
  +
*[[media:2-Bromo-3-hexylthiophene MSDS.pdf|2-Bromo-3-hexylthiophene MSDS]]
  +
*[[media:2-Hydroxy-2-Methylpropiophenone MSDS.pdf|2-Hydroxy-2-Methylpropiophenone MSDS]]
  +
*[[media:3-Aminopropyl)triethoxysilane MSDS.pdf|3-Aminopropyl)triethoxysilane MSDS]]
  +
*[[media:18-Crown-6 MSDS.pdf|18-Crown-6 MSDS]]
  +
*[[media:1165 Stripper MSDS.pdf|1165 Stripper MSDS]]
  +
*[[media:Accuglass 103 Solvent MSDS.pdf|Accuglass 103 Solvent MSDS]]
  +
*[[media:Accuglass T-12B MSDS.pdf|Accuglass T-12B MSDS]]
  +
*[[media:ACCUGLASS T-12B Spin-On-Glass MSDS.pdf|ACCUGLASS T-12B Spin-On-Glass MSDS]]
  +
*[[media:ACEM 365iS MSDS.pdf|ACEM 365iS MSDS]]
  +
*[[media:Additive S-1 MSDS.pdf|Additive S-1 MSDS]]
  +
*[[media:Adhesion Promoter AP3000 MSDS.pdf|Adhesion Promoter AP3000 MSDS]]
  +
*[[media:Adhesion Promoter VM-651 MSDS.pdf|Adhesion Promoter VM-651 MSDS]]
  +
*[[media:Alkyl Quaternary Ammonium Bentonite MSDS.pdf|Alkyl Quaternary Ammonium Bentonite MSDS]]
  +
*[[media:Alpha Alpha Alpha Trifluorotoluene MSDS.pdf|Alpha Alpha Alpha Trifluorotoluene MSDS]]
  +
*[[media:Aluminum Fluoride MSDS.pdf|Aluminum Fluoride MSDS]]
  +
*[[media:Aluminum Oxide MSDS.pdf|Aluminum Oxide MSDS]]
  +
*[[media:Ammonia MSDS.pdf|Ammonia MSDS]]
  +
*[[media:Ammonium Chloride MSDS.pdf|Ammonium Chloride MSDS]]
  +
*[[media:Ammonium Tartrate MSDS.pdf|Ammonium Tartrate MSDS]]
  +
*[[media:Antimony Powder MSDS.pdf|Antimony Powder MSDS]]
  +
*[[media:AP 3000 Adhesion Promoter MSDS.pdf|AP 3000 Adhesion Promoter MSDS]]
  +
*[[media:AquaBond 55 MSDS.pdf|AquaBond 55 MSDS]]
  +
*[[media:AquaBond 65 MSDS.pdf|AquaBond 65 MSDS]]
  +
*[[media:AquaBond 85 MSDS.pdf|AquaBond 85 MSDS]]
  +
*[[media:AquaClean 900 MSDS.pdf|AquaClean 900 MSDS]]
  +
*[[media:ARC i-CON-7 Anti Reflective MSDS.pdf|ARC i-CON-7 Anti Reflective MSDS]]
  +
*[[media:ARC i-CON-16 MSDS.pdf|ARC i-CON-16 MSDS]]
  +
*[[media:Arcosolv PM Solvent MSDS.pdf|Arcosolv PM Solvent MSDS]]
  +
*[[media:Argon MSDS.pdf|Argon MSDS]]
  +
*[[media:Axarel 2200 Defluxed Degreaser MSDS.pdf|Axarel 2200 Defluxed Degreaser MSDS]]{|
  +
*[[media:AZ 300 MIF Developer MSDS.pdf|AZ 300 MIF Developer MSDS]]
  +
*[[media:AZ 300T Stripper MSDS.pdf|AZ 300T Stripper MSDS]]
  +
*[[media:AZ 400K Developer MSDS.pdf|AZ 400K Developer MSDS]]
  +
*[[media:AZ 726 MIF Developer MSDS.pdf|AZ 726 MIF Developer MSDS]]
  +
*[[media:AZ 726 MIF Developer MSDS2.pdf|AZ 726 MIF Developer (2) MSDS]]
  +
*[[media:AZ 1518 Photoresist MSDS.pdf|AZ 1518 Photoresist MSDS]]
  +
*[[media:AZ Aquatar VIII-A 45 MSDS.pdf|AZ Aquatar VIII-A 45 MSDS]]
  +
*[[media:AZ Aquatar VIII-A 45 MSDS(2).pdf|AZ Aquatar VIII-A 45 MSDS (2)]]
  +
*[[media:AZ Developer MSDS.pdf|AZ Developer MSDS]]
  +
*[[media:AZ EBR Edge Bead Remover MSDS.pdf|AZ EBR Edge Bead Remover MSDS]]
  +
*[[media:AZ LExp.KDB087F 42 MSDS.pdf|AZ LExp.KDB087F 42 MSDS]]
  +
*[[media:AZ LOL 2000 Photoresist MSDS.pdf|AZ LOL 2000 Photoresist MSDS]]
  +
*[[media:AZ nLOF 2020 Photoresist MSDS.pdf|AZ nLOF 2020 Photoresist MSDS]]
  +
*[[media:AZ nLOF 2070 Photoresist MSDS.pdf|AZ nLOF 2070 Photoresist MSDS]]
  +
*[[media:AZ nLOF 5510 Photoresist MSDS.pdf|AZ nLOF 5510 Photoresist MSDS]]
  +
*[[media:AZ P4110 Photoresist MSDS.pdf|AZ P4110 Photoresist MSDS]]
  +
*[[media:AZ P4210 Photoresist MSDS.pdf|AZ P4210 Photoresist MSDS]]
  +
*[[media:AZ P4330 RS Photoresist MSDS.pdf|AZ P4330 RS Photoresist MSDS]]
  +
*[[media:AZ P4620 Photoresist MSDS.pdf|AZ P4620 Photoresist MSDS]]
  +
*[[media:AZ P5214 EIR Photoresist MSDS.pdf|AZ P5214 EIR Photoresist MSDS]]
  +
*[[media:AZ R200 Coating MSDS.pdf|AZ R200 Coating MSDS]]
  +
*[[media:AZ SH-114A MSDS.pdf|AZ SH-114A MSDS]]
  +
*[[media:Benzoyl Peroxide MSDS.pdf|Benzoyl Peroxide MSDS]]
  +
*[[media:Bipyridyl Dichlororuthenium II Hexahydrate MDSD.pdf|Bipyridyl Dichlororuthenium II Hexahydrate MDSD]]
  +
*[[media:BIS Cyclopentadienyl Iron (Ferrocene) MSDS.pdf|BIS Cyclopentadienyl Iron (Ferrocene) MSDS]]
  +
*[[media:BIS Cyclopentadienyl Magnesium MSDS.pdf|BIS Cyclopentadienyl Magnesium MSDS]]
  +
*[[media:Bismuth.pdf|Bismuth]]
  +
*[[media:Brewer Science WaferBOND HT-10 MSDS.pdf|Brewer Science WaferBOND HT-10 MSDS]]
  +
*[[media:Brewer Science WaferBOND Remover MSDS.pdf|Brewer Science WaferBOND Remover MSDS]]
  +
*[[media:Bromine MSDS.pdf|Bromine MSDS]]
  +
*[[media:Buffered Oxide Etch JT Baker MSDS.pdf|Buffered Oxide Etch JT Baker MSDS]]
  +
*[[media:CAaD Poymers MSDS.pdf|CAaD Poymers MSDS]]
  +
*[[media:Calcium Fluoride MSDS.pdf|Calcium Fluoride MSDS]]
  +
*[[media:Carbon Black MSDS.pdf|Carbon Black MSDS]]
  +
*[[media:Carbon Tetrachloride MSDS.pdf|Carbon Tetrachloride MSDS]]
  +
*[[media:CEM 365 IS MSDS.pdf|CEM 365 IS MSDS]]
  +
*[[media:Cesium Fluoride MSDS.pdf|Cesium Fluoride MSDS]]
  +
*[[media:Cesium Hydroxide Monohydrate MSDS.pdf|Cesium Hydroxide Monohydrate MSDS]]
  +
*[[media:CF19-2186 Part A MSDS.PDF|CF19-2186 Part A MSDS]]
  +
*[[media:CF19-2186 Part B MSDS.PDF|CF19-2186 Part B MSDS]]
  +
*[[media:Chlorine MSDS.pdf|Chlorine MSDS]]
  +
*[[media:Chloroform MSDS.pdf|Chloroform MSDS]]
  +
*[[media:Chromium Etchant 1020AC MSDS.pdf|Chromium Etchant 1020AC MSDS]]
  +
*[[media:CLEVIOS P MSDS.pdf|CLEVIOS P MSDS]]
  +
*[[media:Clorobenzene MSDS.pdf|Clorobenzene MSDS]]
  +
*[[media:Collodion MSDS.pdf|Collodion MSDS]]
  +
*[[media:Copolmyer MMA(8.5)MAA(EL9) MSDS.pdf|Copolmyer MMA(8.5)MAA(EL9) MSDS]]
  +
*[[media:Copper (II) Sulfate Pentahydrate MSDS.pdf|Copper (II) Sulfate Pentahydrate MSDS]]
  +
*[[media:Cyclohexane MSDS.pdf|Cyclohexane MSDS]]
  +
*[[media:Cyclopentanone MSDS.pdf|Cyclopentanone MSDS]]
  +
*[[media:Cyclotene 3022 MSDS.pdf|Cyclotene 3022 MSDS]]
  +
*[[media:Cyclotene 4000 Resin MSDS.pdf|Cyclotene 4000 Resin MSDS]]
  +
*[[media:Cyclotene 4022 MSDS.pdf|Cyclotene 4022 MSDS]]
  +
*[[media:Cyclotene 4024-40 BCB MSDS.pdf|Cyclotene 4024-40 BCB MSDS]]
  +
*[[media:Cyclotene 4026 Resin MSDS.pdf|Cyclotene 4026 Resin MSDS]]
  +
| width="300" |
  +
*[[media:DE-6018 Polymide Developer MSDS.pdf|DE-6018 Polymide Developer MSDS]]
  +
*[[media:DE9040 Developer MSDS.pdf|DE9040 Developer MSDS]]
  +
*[[media:Developer DS3000 MSDS.pdf|Developer DS3000 MSDS]]
  +
*[[media:Dibenzo-18-crown-6 MSDS.pdf|Dibenzo-18-crown-6 MSDS]]
  +
*[[media:Diethoxyethane MSDS.pdf|Diethoxyethane MSDS]]
  +
*[[media:Diethylzinc MSDS.pdf|Diethylzinc MSDS]]
  +
*[[media:Dimethyldydrazine MSDS.pdf|Dimethyldydrazine MSDS]]
  +
*[[media:Dimethylsila-17-Crown-6 MSDS.pdf|Dimethylsila-17-Crown-6 MSDS]]
  +
*[[media:Dimethylsulfoxide MSDS.pdf|Dimethylsulfoxide MSDS]]
  +
*[[media:Disilane MSDS.pdf|Disilane MSDS]]
  +
*[[media:Dodecanethiol MSDS.pdf|Dodecanethiol MSDS]]
  +
*[[media:Dow Corning WL-5150 MSDS.pdf|Dow Corning WL-5150 MSDS]]
  +
*[[media:DS 2100 BCB Developer MSDS.pdf|DS 2100 BCB Developer MSDS]]
  +
*[[media:Dynasolve 165 MSDS.pdf|Dynasolve 165 MSDS]]
  +
*[[media:Dynasolve 185 MSDS.pdf|Dynasolve 185 MSDS]]
  +
*[[media:EC11 Solvent MSDS.pdf|EC11 Solvent MSDS]]
  +
*[[media:ECF-63 Gold Plating Solution MSDS.pdf|ECF-63 Gold Plating Solution MSDS]]
  +
*[[media:EKC 1020 Photoresist MSDS.pdf|EKC 1020 Photoresist MSDS]]
  +
*[[media:EKC 265 Stripper MSDS.pdf|EKC 265 Stripper MSDS]]
  +
*[[media:Epo Tek H20E, Part A & B.pdf|Epo Tek H20E]]
  +
*[[media:Er(TMOD)3 MSDS.pdf|Er(TMOD)3 MSDS]]
  +
*[[media:Ethylenediamine MSDS.pdf|Ethylenediamine MSDS]]
  +
*[[media:FC-4430 MSDS.pdf|FC-4430 MSDS]]
  +
*[[media:FC-4432 MSDS.pdf|FC-4432 MSDS]]
  +
*[[media:FOX-16 Flowable Oxide MSDS.pdf|FOX-16 Flowable Oxide MSDS]]
  +
*[[media:FTO 100-FBA5 Etchant MSDS.pdf|FTO 100-FBA5 Etchant MSDS]]
  +
*[[media:Fe-Pt Bimetallic Nanoparticles in Hexane MSDS.pdf|Fe-Pt Bimetallic Nanoparticles in Hexane MSDS]]
  +
*[[media:Ferric Chloride Hexahydrate MSDS.pdf|Ferric Chloride Hexahydrate MSDS]]
  +
*[[media:Ferric Nitrate Nonahydrate MSDS.pdf|Ferric Nitrate Nonahydrate MSDS]]
  +
*[[media:Ferrous Sulfate MSDS.pdf|Ferrous Sulfate MSDS]]
  +
*[[media:Filmtronics 700B Spin On Glass MSDS.pdf|Filmtronics 700B Spin On Glass MSDS]]
  +
*[[media:Fomblin Y-LVAC 25-6 MSDS.pdf|Fomblin Y-LVAC 25/6 MSDS]]
  +
*[[media:Freon 13B1 Refrigerant MSDS.pdf|Freon 13B1 Refrigerant MSDS]]
  +
*[[media:Gadolinium Oxide MSDS.pdf|Gadolinium Oxide MSDS]]
  +
*[[media:Gallium Arsenide MSDS.pdf|Gallium Arsenide MSDS]]
  +
*[[media:Germanium MSDS.pdf|Germanium MSDS]]
  +
*[[media:Glycerol MSDS.pdf|Glycerol MSDS]]
  +
*[[media:Gold Chloride Hydrate MSDS.pdf|Gold Chloride Hydrate MSDS]]
  +
*[[media:Gold Etchant GE-8148-GE-8110 MSDS.pdf|Gold Etchant GE-8148/GE-8110 MSDS]]
  +
*[[media:HD-8820 MSDS.pdf|HD-8820 MSDS]]
  +
*[[media:HD-8820 Polyimide MSDS.pdf|HD-8820 Polyimide MSDS]]
  +
*[[media:HMDS MSDS.pdf|HMDS MSDS]]
  +
*[[media:Hafnium MSDS.pdf|Hafnium MSDS]]
  +
*[[media:Hafnium Oxide MSDS.pdf|Hafnium Oxide MSDS]]
  +
*[[media:Hexadecane MSDS.pdf|Hexadecane MSDS]]
  +
*[[media:Hexamethyldisilazane MSDS.pdf|Hexamethyldisilazane MSDS]]
  +
*[[media:Hexanediol Diacrylate MSDS.pdf|Hexanediol Diacrylate MSDS]]
  +
*[[media:Hydrogen Iodide MSDS.pdf|Hydrogen Iodide MSDS]]
  +
*[[media:Hydrogen MSDS.pdf|Hydrogen MSDS]]
  +
*[[media:IC1-200 Spin On Glass MSDS.pdf|IC1-200 Spin On Glass MSDS]]
  +
*[[media:Imidazole MSDS.pdf|Imidazole MSDS]]
  +
*[[media:Indium MSDS.pdf|Indium MSDS]]
  +
*[[media:Indium Phosphide MSDS.pdf|Indium Phosphide MSDS]]
  +
*[[media:Iodine MSDS.pdf|Iodine MSDS]]
  +
*[[media:Iodine-Bromide Solution MSDS.pdf|Iodine-Bromide Solution MSDS]]
  +
*[[media:Iridium (IV) Chloride MSDS.pdf|Iridium (IV) Chloride MSDS]]
  +
*[[media:Isopropyl Alcohol MSDS.pdf|Isopropyl Alcohol MSDS]]
  +
*[[media:JSR NFC FZX F112 Photoresist Overcoat MSDS.pdf|JSR NFC FZX F112 Photoresist Overcoat MSDS]]
  +
*[[media:JSR NSD 2533Y Photoresist MSDS.pdf|JSR NSD 2533Y Photoresist MSDS]]
  +
*[[media:LDD 26W Developer MSDS.pdf|LDD 26W Developer MSDS]]
  +
*[[media:LOL 2000 Lift Off Layer MSDS.pdf|LOL 2000 Lift Off Layer MSDS]]
  +
*[[media:LOR A Photoresist MSDS.pdf|LOR A Photoresist MSDS]]
  +
*[[media:LOR B Photoresist MSDS.pdf|LOR B Photoresist MSDS]]
  +
*[[media:Lanthanum Fluoride MSDS.pdf|Lanthanum Fluoride MSDS]]
  +
*[[media:Lead Metal MSDS.pdf|Lead Metal MSDS]]
  +
*[[media:MF 24A Developer MSDS.pdf|MF 24A Developer MSDS]]
  +
*[[media:MF-701 Developer MSDS.pdf|MF-701 Developer MSDS]]
  +
*[[media:MICRAL 9400 MSDS.pdf|MICRAL 9400 MSDS]]
  +
*[[media:MMA(8.5)MAA Copolymer Series Resists MSDS.pdf|MMA(8.5)MAA Copolymer Series Resists MSDS]]
  +
*[[media:MR-i 7000 series MSDS.pdf|MR-i 7000 series MSDS]]
  +
*[[media:Magnesium Fluoride MSDS.pdf|Magnesium Fluoride MSDS]]
  +
*[[media:Manganese Pieces MSDS.pdf|Manganese Pieces MSDS]]
  +
*[[media:Manganese Sulfate MSDS.pdf|Manganese Sulfate MSDS]]
  +
*[[media:Mesitylene MSDS.pdf|Mesitylene MSDS]]
  +
*[[media:Methacryloxypropyltrimethoxysilane-3 MSDS.pdf|Methacryloxypropyltrimethoxysilane-3 MSDS]]
  +
*[[media:Methane MSDS.pdf|Methane MSDS]]
  +
*[[media:Methylstyrene MSDS.pdf|Methylstyrene MSDS]]
  +
*[[media:Methyltrimethoxysilane MSDS.pdf|Methyltrimethoxysilane MSDS]]
  +
*[[media:MicroChem 101 Developer MSDS.pdf|MicroChem 101 Developer MSDS]]
  +
*[[media:Microposit 351 Developer MSDS.pdf|Microposit 351 Developer MSDS]]
  +
*[[media:Microposit S1822 Photoresist MSDS.pdf|Microposit S1822 Photoresist MSDS]]
  +
*[[media:Microprime HP Primer MSDS.pdf|Microprime HP Primer MSDS]]
  +
*[[media:Mung MSDS.pdf|Mung MSDS]]
  +
| width="300" |
  +
*[[media:N Methyl 2 Pyrrolidone MSDS.pdf|N Methyl 2 Pyrrolidone MSDS]]
  +
*[[media:NANO 495PMMA MSDS.pdf|NANO 495PMMA MSDS]]
  +
*[[media:NANO LOR B Series Resist MSDS.pdf|NANO LOR B Series Resist MSDS]]
  +
*[[media:NANO MMA(17.5)MAA EL 10 MSDS.pdf|NANO MMA(17.5)MAA EL 10 MSDS]]
  +
*[[media:NEB-31 Photoresist MSDS.pdf|NEB-31 Photoresist MSDS]]
  +
*[[media:NOE Etch I MSDS.pdf|NOE Etch I MSDS]]
  +
*[[media:NR5-8000 Photoresist MSDS.pdf|NR5-8000 Photoresist MSDS]]
  +
*[[media:NR7-1500PY Photoresist MSDS.pdf|NR7-1500PY Photoresist MSDS]]
  +
*[[media:NR71-6000PY Photoresist MSDS.pdf|NR71-6000PY Photoresist MSDS]]
  +
*[[media:NR9-8000 Photoresist MSDS.pdf|NR9-8000 Photoresist MSDS]]
  +
*[[media:NXR-1010 Imprint Resist MSDS.pdf|NXR-1010 Imprint Resist MSDS]]
  +
*[[media:NXR-1020 Imprint Resist MSDS.pdf|NXR-1020 Imprint Resist MSDS]]
  +
*[[media:NXR-2010 Imprint Resist MSDS.pdf|NXR-2010 Imprint Resist MSDS]]
  +
*[[media:NXR-3020 Imprint Resist MSDS.pdf|NXR-3020 Imprint Resist MSDS]]
  +
*[[media:NXR-3022 Imprint Resist MSDS.pdf|NXR-3022 Imprint Resist MSDS]]
  +
*[[media:Nano MMA Photoresist MSDS.pdf|Nano MMA Photoresist MSDS]]
  +
*[[media:Nano PMGI SF-series Photoresist MSDS.pdf|Nano PMGI SF-series Photoresist MSDS]]
  +
*[[media:NanoRemover PG Photoresist Remover MSDS.pdf|NanoRemover PG Photoresist Remover MSDS]]
  +
*[[media:NanoStrip MSDS.pdf|NanoStrip MSDS]]
  +
*[[media:Nanochem OMA MSDS.pdf|Nanochem OMA MSDS]]
  +
*[[media:Negative Resist NR9-8000 MSDS.pdf|Negative Resist NR9-8000 MSDS]]
  +
*[[media:Nickel Ammonium Sulfate MSDS.pdf|Nickel Ammonium Sulfate MSDS]]
  +
*[[media:Nickel Chloride MSDS.pdf|Nickel Chloride MSDS]]
  +
*[[media:Nickel MSDS.pdf|Nickel MSDS]]
  +
*[[media:Nickel Sulfamate MSDS.pdf|Nickel Sulfamate MSDS]]
  +
*[[media:Nickel Sulfamate Plating Solution MSDS.pdf|Nickel Sulfamate Plating Solution MSDS]]
  +
*[[media:Nickel Sulfamate Semi-Bright Nickel "S" MSDS.pdf|Nickel Sulfamate Semi-Bright Nickel "S" MSDS]]
  +
*[[media:Nickel Sulfate Crystal MSDS.pdf|Nickel Sulfate Crystal MSDS]]
  +
*[[media:Nickelous Sulfate MSDS.pdf|Nickelous Sulfate MSDS]]
  +
*[[media:Nickle (II) Carbonate MSDS.pdf|Nickle (II) Carbonate MSDS]]
  +
*[[media:Nitrogen MSDS.pdf|Nitrogen MSDS]]
  +
*[https://drive.google.com/embeddedfolderview?id=1mscwkrCLWJ7Vorkk-E8HokFy1VK_ZHGw#list MSDS Drive #3 (DJ)]
  +
|-
  +
|}
  +
  +
{{MSDS}}

Latest revision as of 12:50, 4 September 2021

Below is a list of all chemicals authorized for use in the lab & links to the corresponding Material Safety Data Sheets (MSDS).

Only the chemicals that appear in bold are stocked by the lab for general use. All other listed chemicals have been authorized for individual users/companies to bring in for their own use.

MSDS sheets can be used to determine the concentrations and constituents of a particular chemical, in addition to safety, handling and emergency/exposure information. Please take time to look at the MSDS of the chemicals you use!

Acids

Bases

Lithography Chemicals

Please see the Recipes > Lithography > Chemical Datasheetspage for the datasheets, which include starting parameters for your fabrication processes.

Chemical MSDS Datasheet
1165 Stripper 1165 Stripper MSDS 1165 Stripper Datasheet
Accuglass T-12B Accuglass T-12B MSDS
AP 3000 Adhesion Promoter AP 3000 Adhesion Promoter
AZ 300 MIF Developer
AZ 300T Stripper
AZ 400K Developer
AZ 726 MIF Developer
AZ EBR Edge Bead Remover
AZ LOL 2000 Photoresist
AZ nLOF 2020 Photoresist
AZ nLOF 5510 Photoresist
AZ NMP Stripper AZ NMP RINSE NMP Docs on MicroChem
AZ P4110 Photoresist
AZ P4210 Photoresist
AZ P4330 RS Photoresist
AZ P5214 EIR Photoresist
CEM 365 IS
Cyclotene 4024-40 BCB
DS 2100 VCS Developer
HMDS
ma-N 2403 Photoresist
mr-l-7000 Imprint Polymer mr-l-7000 Datasheet
MCC-101 Developer
Nano MMA Photoresist
NR7-1500PY Photoresist
NXR-1010 Imprint Resist
NXR-1020 Imprint Resist NXR-1020 Datasheet
OCG 825 Photoresist
PMGI SF-series Photoresist
PRX-127 Stripper
RD6 Developer
S1805 Photoresist
SPR 220 Photoresist
SPR 510A Photoresist
SPR 518A Photoresist
SPR 950-0.8 Photoresist
SPR 955 CM
SVC-14 Stripper
Thinner P

Solvents

Other Chemicals

UNSORTED

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