Chemical-Mechanical Polisher (Logitech)

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Chemical-Mechanical Polisher (Logitech)
Tool Type Dry Etch
Location Bay 5
Supervisor Bill Millerski
Supervisor Phone (805) 893-2655
Supervisor E-Mail
Description ORBIS Chemical Mechanical Polisher
Manufacturer Logitech
Dry Etch Recipes
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The Logitech Orbis system is used in the facility for fine-scale polishing and planarization of a variety of materials including glass, silicon, GaAs, InP, GaN, etc. Wafers up to 6” diameter can be polished on the system.

Several slurries and pads are available to provide a range of polishing options depending on the material being processed. Pieces can also be handled on the system by wax-mounting with the Logitech Bonder.

Each process is often unique in geometry and material combinations so that independent process development is required for most CMP applications.