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Category:Lithography
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Tool List#Lithography
Pages in category "Lithography"
The following 21 pages are in this category, out of 21 total.
C
Contact Aligner (SUSS MA-6)
Contact Alignment Recipes
D
Direct-Write Lithography Recipes
DUV Flood Expose
E
E-Beam Lithography System (JEOL JBX-6300FS)
F
Focused Ion-Beam Lithography (Raith Velion)
H
High Temp Oven (Blue M)
Holographic Lith/PL Setup (Custom)
I
IR Aligner (SUSS MJB-3 IR)
L
Lithography Recipes
M
Maskless Aligner (Heidelberg MLA150)
N
Nano-Imprint (Nanonex NX2000)
O
Oven 4 (Thermo-Fisher HeraTherm)
Oven 5 (Labline)
Ovens 1, 2 & 3 (Labline)
S
Stepper 1 (GCA 6300)
Stepper 2 (AutoStep 200)
Stepper 3 (ASML DUV)
Stepper Recipes
Suss Aligners (SUSS MJB-3)
V
Vacuum Oven (YES)
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