Difference between revisions of "Bill Millerski"
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* [[Stepper 2 (AutoStep 200)]] | * [[Stepper 2 (AutoStep 200)]] | ||
* [[Ion Beam Deposition (Veeco NEXUS)]] | * [[Ion Beam Deposition (Veeco NEXUS)]] | ||
| + | * [[RIE 5 (PlasmaTherm)]] | ||
| + | * [[Rapid Thermal Processor (AET RX6)]] | ||
| + | * [[Rapid Thermal Processor (SSI Solaris 150)]] | ||
| + | * [[Step Profilometer (KLA Tencor P-7)]] | ||
| + | * [[Chemical-Mechanical Polisher (Logitech)]] | ||
| + | || | ||
| + | * [[XeF2 Etch (Xetch)]] | ||
| + | * [[Mechanical Polisher (Allied)]] | ||
| + | * [[Tube Furnace Wafer Bonding (Thermco)]] | ||
| + | * [[E-Beam 1 (Sharon)]] | ||
| + | * [[Resistivity Mapper (CDE RESMAP)]] | ||
| + | * [[Optical Film Thickness (Nanometric)]] | ||
| + | * [[Vapor HF Etch]] | ||
| + | * [[Wafer Bonder (Logitech WBS7)]] | ||
|} | |} | ||
Latest revision as of 07:28, 28 October 2021
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About
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Tools
Bill Millerski is the supervisor for the following tools.