Difference between revisions of "Bill Millerski"
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* [[Stepper 2 (AutoStep 200)]] |
* [[Stepper 2 (AutoStep 200)]] |
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* [[Ion Beam Deposition (Veeco NEXUS)]] |
* [[Ion Beam Deposition (Veeco NEXUS)]] |
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| + | * [[RIE 5 (PlasmaTherm)]] |
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| + | * [[Rapid Thermal Processor (AET RX6)]] |
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| + | * [[Rapid Thermal Processor (SSI Solaris 150)]] |
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| + | * [[Step Profilometer (KLA Tencor P-7)]] |
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| + | * [[Chemical-Mechanical Polisher (Logitech)]] |
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| + | || |
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| + | * [[XeF2 Etch (Xetch)]] |
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| + | * [[Mechanical Polisher (Allied)]] |
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| + | * [[Tube Furnace Wafer Bonding (Thermco)]] |
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| + | * [[E-Beam 1 (Sharon)]] |
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| + | * [[Resistivity Mapper (CDE RESMAP)]] |
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| + | * [[Optical Film Thickness (Nanometric)]] |
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| + | * [[Vapor HF Etch]] |
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| + | * [[Wafer Bonder (Logitech WBS7)]] |
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|} |
|} |
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Latest revision as of 08:28, 28 October 2021
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About
.
.
.
Tools
Bill Millerski is the supervisor for the following tools.