Biljana Stamenic

Biljana Stamenic Position Senior Development Engineer Room Number 1109F Phone 805-893-4002 E-Mail biljana@ece.ucsb.edu

About

Biljana is the senior development engineer for the facility and is responsible for process control management, and process and developmental support for users ( external and internal).

Current Work

Biljana is working on process control management (PECVD, Advanced PECVD, IBD, and ICP etchers) to establish statistical process control. Biljana is also working on process development and users support.

Tools

Biljana Stamenic is in charge of the following tools:

• Stepper 1 (GCA 6300)
• Stepper 2 (AutoStep 200, i-line)
• Surface Analysis (KLA/Tencor Surfscan)