Autostep 200 User Accessible Commands
These are the user accessible commands and useful control characters.
List of commands
CHUCK- To change chuck size
COPY – Use this command to copy a file(job) from someone else’ s directory to your own. You will need to know the user log in info and the filename.
- Log into the account you want to copy to (for example LOG IN [10,3] )
- Account to copy from [10,61]
- Account to copy to [10,3]
- Job to copy: TEST
- LOG IN [10,3]
- From? [10,61]TEST.*
- To? [10,3]
COPY – Use this command to copy a file (jobx) to another file (joby) in the same directory. Edit (joby) and make changes if needed.
- COPY JOBx JOBy
DELETE – Removes a file from system
DISP – Display the parameters for a job
EDIT – Use to edit exposure jobs and passes
EX, EXEC – Use this to execute an exposure job
EXPO – Use this to perform a focus and/or exposure calibration
HELP – Use this to find out the syntax and use of any command.
JOB – To edit a job from a menu
LISTF – Lists a directory of files (LISTF T* will list files starting with T; LISTF *T will list files ending with T)
LOAD – moves the stage to the load position, may be needed if the stage/computer hangs up.
LOG IN [10,xxx] – To log into computer. Each group (or company) has unique LOG IN info.
LOG OUT – To log out of system.
PURGE – Delete files from directory
RENAME – Rename a file
RMSL – Load a reticle box into the elevator
RMSR – Return a reticle from the stepper to the box.
SPEC – Create a job file, must go all the way through to save the job.
RMS- Reticle management system
DFAS-dark filed alignment system
List of characters
A – Toggles between left and right alignment die when using non-standard keys.
D – Sets joystick to move from die to die.
T – Sets joystick to move left alignment die under right objective.
E – Exit out of D or T mode so that joystick is back to normal.
O – Vary joystick speed during alignment.
F – Each time you press this, it will move the stage about an increasing spiral path away from the initial location. Use this repeatedly to find the alignment marks for samples placed differently on chuck than in initial exposure.
CTRL C followed by A and Enter – Abort back to colon prompt
CTRL S – stops monitor scrolling function
CTRL Q – resumes monitor scrolling function