Difference between revisions of "Automated Coat/Develop System (S-Cubed Flexi)"
Jump to navigation
Jump to search
m (ToolTemplate: model & mfg. link) |
m (fixed ToolTemplate 'type' arg) |
||
| Line 1: | Line 1: | ||
{{tool|{{PAGENAME}} |
{{tool|{{PAGENAME}} |
||
|picture=TBD.jpg |
|picture=TBD.jpg |
||
| − | |type = Lithography |
||
|super= Tony Bosch |
|super= Tony Bosch |
||
|location=Bay 7 |
|location=Bay 7 |
||
| Line 7: | Line 6: | ||
|manufacturer = [https://www.s-cubed.com S-Cubed] |
|manufacturer = [https://www.s-cubed.com S-Cubed] |
||
|model = Flexi (Custom) |
|model = Flexi (Custom) |
||
| − | | |
+ | |type = Wet Processing |
|recipe = Lithography |
|recipe = Lithography |
||
|materials = |
|materials = |
||
Revision as of 16:25, 8 October 2019
| ||||||||||||||||||||||
THIS TOOL IS ONLY FOR STAFF USE AT THIS TIME.
About
To Be Added
Detailed Specifications
- Wafer Size: 100mm (150mm possible but not set up)
- PR Coating Properties:
- Uniformity < 1.0%
- < 100 particles on 100mm wafer
- Photoresists/Underlayers Available:
- UV6-0.8
- DS-K101-304
- PMMA
- PMGI SF11
- PMGI SF5
- Solvents Available:
- EBR100
- Developers Available:
- AZ 300 MiF
Process Information
- Recipe Page for S-Cubed Coater: Lithography Recipes > Automated Coat/Develop System Recipes (S-Cubed Flexi)
- See the Photolith. Chemicals page for info on the installed resists.
Operating Procedures
- To Be Added