Atomic Layer Deposition Recipes
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Atomic Layer Deposition (Oxford FlexAL)
Al2O3 deposition (ALD)
AlN deposition (ALD)
HfO2 deposition (ALD)
Pt deposition (ALD)
- Need Data
SiO2 deposition (ALD)
ZnO deposition (ALD)
- Need Data Al:ZnO
ZrO2 deposition (ALD)
TiO2 deposition (ALD)
- TiO2 200 recipe WJM_TDMAT_H2O_r2 water dose 1s (pdf file to be added)gives grow rate 0.9 A/cycle as measured by ellipsometer
TiN deposition (ALD)
- Need Data