Difference between revisions of "Atomic Layer Deposition Recipes"
Jump to navigation
Jump to search
| Line 1: | Line 1: | ||
{{recipes|Vacuum Deposition}} |
{{recipes|Vacuum Deposition}} |
||
=[[Atomic Layer Deposition (Oxford FlexAL)]]= |
=[[Atomic Layer Deposition (Oxford FlexAL)]]= |
||
| − | ==Al{{sub|2}}O{{sub|3}} |
+ | ==Al{{sub|2}}O{{sub|3}} deposition== |
| + | |||
| + | *{{fl|ALD-Al2O3-300-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300}} |
||
| + | *{{fl|ALD-Al2O3-300-Saturated-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 300 Saturated}} |
||
| + | *{{fl|ALD-Al2O3-Plasma-300C-Recipe.pdf|Al{{sub|2}}O{{sub|3}} plasma 300C}} |
||
| + | *{{fl|ALD-Al2O3-100-Recipe.pdf|Al{{sub|2}}O{{sub|3}} 100}} |
||