Difference between revisions of "Atomic Layer Deposition (Oxford FlexAL)"
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= About = |
= About = |
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| − | The Oxford Instruments FlexAL Atomic Layer Deposition system at UCSB is a plasma-enhanced ALD system for the precise growth of ultra-thin oxides and nitrides. Self-limiting layer by layer growth ensures precise control, film conformality, and repeatability of the films. |
+ | The Oxford Instruments FlexAL Atomic Layer Deposition system at UCSB is a plasma-enhanced ALD system for the precise growth of ultra-thin oxides and nitrides. Self-limiting layer by layer growth ensures precise control, film conformality, and repeatability of the films. |
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| + | The system currently has metallorganic precursors for Aluminum, Hafnium, Titanium, Platinum, Zirconium, and Silicon oxides and nitrides. Water and Ozone are available for thermal oxides and Oxygen, Ammonia, Nitrogen, and Hydrogen are available for plasma assisted oxides and nitrides. Remote ICP plasma powers up to 600W are possible. |
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| + | The system is load-locked and can accommodate sample temperatures up to 550°C. Processing temperature windows are defined for each material based on growth limitations. The system is step-by-step programmable through a flexible GUI interface. In-situ ellipsometry between growth cycles and mass spectrometry during growth are both available. |
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| + | We have two separate chambers on the Oxford Cluster tool, one dedicated to metals and the other dedicated to dielectrics. The other chamber on the cluster is the [[CAIBE (Oxford Ion Mill)|Oxford Ion Mill]]. |
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=Documentation= |
=Documentation= |
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*[[media:Cluster operating instructions.pdf|Operating Instructions]] |
*[[media:Cluster operating instructions.pdf|Operating Instructions]] |
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| + | **Includes recipe names for various films, and approx. dep. rates. |
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== ALD Recipes == |
== ALD Recipes == |
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| − | See the [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition: Recipes]] page for recipes and thin-film data/measurements. |
+ | * See the [[Atomic_Layer_Deposition_Recipes|Atomic Layer Deposition: Recipes]] page for recipes and thin-film data/measurements. |
| + | * Only staff-provided recipes are allowed to be run on this tool, as achieving the atomic-layer regime is rather complex. Bill Mitchell is the resident expert on ALD recipe development. |
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| + | * The two chambers on the Oxford Cluster tool are separated by film type: |
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| + | ** Chamber #1: Dielectrics Films only |
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| + | ** Chamber #3: Metal Films only |
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| + | * Film Thicknesses are restricted to '''50nm or less'''. Thicker films must be deposited on a different tool, unless specifically given staff permission to do so. |
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==Etch Rates of ALD Films== |
==Etch Rates of ALD Films== |
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| − | *[[media: |
+ | *[[media:Wet Etching of ALD Al2O3 Plasma 300C.xls|Al2O3 Plasma 300C Wet Etch Rates]] |
Revision as of 16:37, 3 July 2018
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About
The Oxford Instruments FlexAL Atomic Layer Deposition system at UCSB is a plasma-enhanced ALD system for the precise growth of ultra-thin oxides and nitrides. Self-limiting layer by layer growth ensures precise control, film conformality, and repeatability of the films.
The system currently has metallorganic precursors for Aluminum, Hafnium, Titanium, Platinum, Zirconium, and Silicon oxides and nitrides. Water and Ozone are available for thermal oxides and Oxygen, Ammonia, Nitrogen, and Hydrogen are available for plasma assisted oxides and nitrides. Remote ICP plasma powers up to 600W are possible.
The system is load-locked and can accommodate sample temperatures up to 550°C. Processing temperature windows are defined for each material based on growth limitations. The system is step-by-step programmable through a flexible GUI interface. In-situ ellipsometry between growth cycles and mass spectrometry during growth are both available.
We have two separate chambers on the Oxford Cluster tool, one dedicated to metals and the other dedicated to dielectrics. The other chamber on the cluster is the Oxford Ion Mill.
Documentation
- Operating Instructions
- Includes recipe names for various films, and approx. dep. rates.
ALD Recipes
- See the Atomic Layer Deposition: Recipes page for recipes and thin-film data/measurements.
- Only staff-provided recipes are allowed to be run on this tool, as achieving the atomic-layer regime is rather complex. Bill Mitchell is the resident expert on ALD recipe development.
- The two chambers on the Oxford Cluster tool are separated by film type:
- Chamber #1: Dielectrics Films only
- Chamber #3: Metal Films only
- Film Thicknesses are restricted to 50nm or less. Thicker films must be deposited on a different tool, unless specifically given staff permission to do so.