Difference between revisions of "ASML Stepper 3 Error Recovery, Troubleshooting and Calibration"

Revision as of 14:39, 17 July 2018

Make sure no Batches are Running or Waiting! Abort the Batch or Stop the Queue.
1. Never exit the Task Streaming screen while Batches are incomplete/running, you will enter software limbo on infinite loop drive, requiring a software restart.
Lift black cover behind keyboard
Press AWH button for 1 sec and release (resets Wafer Handler)
Wait until wafer handler “system booting” message is done and warning window in bottom left of main computer console has disappeared. Log window should say it booted succesfully. Takes a few minutes.
(DO NOT do FAST STARTUP from error message, go to main menu!)
Exit to main menu
Go to Start/Stop
Fast Startup
Start - will reinitialize the wafer handler system
Once complete, back to main menu
If wafers in machine, go to material handler (Mat Hdl).
1. Go to Remove Wafers menu and Collect Wafers
2. Back to main menu when finished.
If system says wafer is missing, contact engineer

Main Menu > Test Manager > Run Tests > Metrology Verification > Image Quality Control
Accept (Upper Button)
Perform Measurement
Choose System Correction
1. # Cycles = 1
2. # Measurements = 3
3. # Corrections = 1
4. M "Measure" mode only (does Not update internal lookup tables)
5. (UCSB numbers for test 1 3 1 M)
Accept to run the test
1. If | focus correction | < 50nm, system OK, note number in log book
2. If | focus correction | > 50nm, run test again, if number keeps dropping, keep running until number stable
3. If | focus correction | is still > 50nm, discuss with engineer

Main Menu > Test Manager
Open Cmd Handler (Cmd Hdl) (Top Menu)
1. Illumination and Projection > Illumination
  1. Use Laser Start if laser asking for gas injection, otherwise do New Laser Fill

@@ Line 7: / Line 7: @@
 # Resize window and place in upper right area of screen as normal.
-=== Wafer Recovery / Wafer Handler Issues during Batch operation ===
+=== '''Wafer Recovery''' / Wafer Handler Issues during Batch operation ===
 # Make sure no Batches are Running or Waiting!  '''Abort''' the Batch or '''Stop''' the Queue.
 ## Never exit the Task Streaming screen while Batches are incomplete/running, you will enter software limbo on infinite loop drive, requiring a software restart.