Difference between revisions of "ASML Stepper 3 Error Recovery, Troubleshooting and Calibration"
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(copy/pasted BT's procedures, fomratting) |
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# At '''%''' prompt, type '''''logging''''' (all lowercase!) |
# At '''%''' prompt, type '''''logging''''' (all lowercase!) |
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# Resize window and place in upper right area of screen as normal. |
# Resize window and place in upper right area of screen as normal. |
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+ | # Make sure no Batches are Running or Waiting! '''Abort''' the Batch or '''Stop''' the Queue. |
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+ | ## Never exit the Task Streaming screen while Batches are incomplete/running, you will enter software limbo on infinite loop drive, requiring a software restart. |
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=== IQC (Image Quality Control) Calibration Check === |
=== IQC (Image Quality Control) Calibration Check === |
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## If '''| focus correction |''' > 50nm, run test again, if number keeps dropping, keep running until number stable |
## If '''| focus correction |''' > 50nm, run test again, if number keeps dropping, keep running until number stable |
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## If '''| focus correction |''' is still > 50nm, discuss with engineer |
## If '''| focus correction |''' is still > 50nm, discuss with engineer |
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=== Laser Refill (or laser calling for gas injection) === |
=== Laser Refill (or laser calling for gas injection) === |
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# '''Main Menu > Test Manager''' |
# '''Main Menu > Test Manager''' |
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# Open Cmd Handler '''(Cmd Hdl)''' (Top Menu) |
# Open Cmd Handler '''(Cmd Hdl)''' (Top Menu) |
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− | ## Illumination and Projection > Illumination |
+ | ## '''Illumination and Projection > Illumination''' |
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− | ### New Laser Fill |
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Revision as of 14:35, 17 July 2018
Error, Calibration, Error logging Procedures for Users
Error Log full
- Close logging window
- Open new console window: Rt click on Desktop, select (ASML)
- At % prompt, type logging (all lowercase!)
- Resize window and place in upper right area of screen as normal.
Wafer Recovery / Wafer Handler Issues during Batch operation
- Make sure no Batches are Running or Waiting! Abort the Batch or Stop the Queue.
- Never exit the Task Streaming screen while Batches are incomplete/running, you will enter software limbo on infinite loop drive, requiring a software restart.
- Lift black cover behind keyboard
- Press AWH button for 1 sec and release (resets Wafer Handler)
- Wait until wafer handler “system booting” message is done and warning window in bottom left of main computer console has disappeared. Log window should say it booted succesfully. Takes a few minutes.
- (DO NOT do FAST STARTUP from error message, go to main menu!)
- Exit to main menu
- Go to Start/Stop
- Fast Startup
- Start - will reinitialize the wafer handler system
- Once complete, back to main menu
- If wafers in machine, go to material handler (Mat Hdl).
- Go to Remove Wafers menu and Collect Wafers
- Back to main menu when finished.
- If system says wafer is missing, contact engineer
IQC (Image Quality Control) Calibration Check
- Main Menu > Test Manager > Run Tests > Metrology Verification > Image Quality Control
- Accept (Upper Button)
- Perform Measurement
- Choose System Correction
- # Cycles = 1
- # Measurements = 3
- # Corrections = 1
- M "Measure" mode only (does Not update internal lookup tables)
- (UCSB numbers for test 1 3 1 M)
- Accept to run the test
- If | focus correction | < 50nm, system OK, note number in log book
- If | focus correction | > 50nm, run test again, if number keeps dropping, keep running until number stable
- If | focus correction | is still > 50nm, discuss with engineer
Laser Refill (or laser calling for gas injection)
- Main Menu > Test Manager
- Open Cmd Handler (Cmd Hdl) (Top Menu)
- Illumination and Projection > Illumination
- Use Laser Start if laser asking for gas injection, otherwise do New Laser Fill
- Illumination and Projection > Illumination