Difference between revisions of "ASML Stepper 3 - UCSB Test Reticles"

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(added contact_mark)
m (→‎Calibration Chart Layout: update table and "UCSB_Cal" descriptions/coords for clarity)
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==== Calibration Chart Layout ====
  
==== Calibration Chart Layout ====
−
[[File:UCSB cal - Screen Shot 2018-07-23 at 12.06.58 PM.png|alt=Layout of the repeating calibration charts|none|thumb|512x512px|Layout of the repeating calibration charts]]
 +
Cell name is "''UCSB_Cal''", with coordinates below pointing to center of this cell.[[File:UCSB cal - Screen Shot 2018-07-23 at 12.06.58 PM.png|alt=Layout of the repeating calibration charts|none|thumb|512x512px|Layout of the repeating calibration charts]]
   
 
==== Resolution Chart Schematic ====
  
==== Resolution Chart Schematic ====
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[[File:Resolution chart OPC - Screen Shot 2018-07-23 at 1.40.48 PM.png|alt=OPC'd Resolution Chart Layout schematic|none|thumb|395x395px|OPC'd Resolution Chart Layout, with res. test from 2.0µm to 0.130µm]]
  
[[File:Resolution chart OPC - Screen Shot 2018-07-23 at 1.40.48 PM.png|alt=OPC'd Resolution Chart Layout schematic|none|thumb|395x395px|OPC'd Resolution Chart Layout, with res. test from 2.0µm to 0.130µm]]
   
−
==== Coords for "UCSB_Cal" Resolution Test Patterns ====
 +
==== Coords for "UCSB_Cal" Calibration Patterns ====
−
Each of the above cells is repeated on the following coordinates:
 +
Each of the above "''UCSB_Cal''" cells, including all 7 patterns, is repeated on the following coordinates across the plate (coords are to the center of the "''UCSB_Cal''" cell):
 
{| class="wikitable"
  
{| class="wikitable"
 
!Image Size
  
!Image Size
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|12.150000
  
|12.150000
 
|-
  
|-
−
|
 +
|" "
 
| -4.050000
  
| -4.050000
 
|12.150000
  
|12.150000
 
|-
  
|-
−
|
 +
|" "
 
| -1.350000
  
| -1.350000
 
|12.150000
  
|12.150000
 
|-
  
|-
−
|
 +
|" "
 
|1.350000
  
|1.350000
 
|12.150000
  
|12.150000
 
|-
  
|-
−
|
 +
|" "
 
|4.050000
  
|4.050000
 
|12.150000
  
|12.150000
 
|-
  
|-
−
|
 +
|" "
 
|6.750000
  
|6.750000
 
|12.150000
  
|12.150000
 
|-
  
|-
−
|
 +
|" "
 
|9.450000
  
|9.450000
 
|12.150000
  
|12.150000
 
|-
  
|-
  +
! colspan="3" |
⚫
|
  
⚫
|
  
⚫
|
  
 
|-
  
|-
 
|
  
|
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|9.450000
  
|9.450000
 
|-
  
|-
  ⚫
|
−
|Alignment Marker
 +
| colspan="2" |''Alignment Marker''
−
|–
  
−
|–
  
 
|-
  
|-
 
|
  
|
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|9.450000
  
|9.450000
 
|-
  
|-
  ⚫
|
−
|Alignment Marker
 +
| colspan="2" |''Alignment Marker''
−
|–
  
−
|–
  
 
|-
  
|-
 
|
  
|
Line 156: Line 152:
 
|9.450000
  
|9.450000
 
|-
  
|-
  +
! colspan="3" |
⚫
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
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|6.750000
  
|6.750000
 
|-
  
|-
  +
! colspan="3" |
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
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|4.050000
  
|4.050000
 
|-
  
|-
  +
! colspan="3" |
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
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|1.350000
  
|1.350000
 
|-
  
|-
  +
! colspan="3" |
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
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| -1.350000
  
| -1.350000
 
|-
  
|-
  +
! colspan="3" |
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
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| -4.050000
  
| -4.050000
 
|-
  
|-
  +
! colspan="3" |
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
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| -6.750000
  
| -6.750000
 
|-
  
|-
  +
! colspan="3" |
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|
Line 380: Line 362:
 
| -9.450000
  
| -9.450000
 
|-
  
|-
  ⚫
|
−
|Alignment Marker
 +
| colspan="2" |''Alignment Marker''
−
|–
  
−
|–
  
 
|-
  
|-
 
|
  
|
Line 400: Line 381:
 
| -9.450000
  
| -9.450000
 
|-
  
|-
  ⚫
|
−
|Alignment Marker
 +
| colspan="2" |''Alignment Marker''
−
|–
  
−
|–
  
 
|-
  
|-
 
|
  
|
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| -9.450000
  
| -9.450000
 
|-
  
|-
  +
! colspan="3" |
−
|
  
−
|
  
−
|
  
 
|-
  
|-
 
|
  
|

Revision as of 17:22, 1 August 2018

Reticle ID: "UCSB-OPC1"

Alignment Markers

Image ID Image Size

X , Y

(Wafer, mm)

Image Shift

X , Y

(Wafer, mm)

Notes/Description Schematics
GCA_Align 0.530000 , 0.140000 -6.750000 , 9.450000 ImageShift references the center of the -X- "global" mark.

The ==||| "Local" mark is X+200µm to the right

has 1.1mm margin on all sides

White is Chrome, Pattern is ClearStepper align - Screen Shot 2018-07-23 at 11.24.31 AM.png
Multi-Purpose Alignment Mark - Positive 0.900000 , 0.900000 -6.750000 , -9.450000 ImageShift is the center coords of the larger "+" mark

Smaller "+" mark is (0.225,-0.225)mm down-right

0.925mm margin on all sides

>> Use this for Dicing Alginment Guides

White is Chrome, Pattern is Clear

GlobalMulti POS - Screen Shot 2018-07-23 at 11.17.23 AM.png

Multi-Purpose Alignment Mark - Negative 0.710000 , 0.710000 6.750000 , -9.450000 ImageShift is the center coords of the larger "+" mark

Smaller "+" mark is (0.225,-0.225)mm down-right

Blank (masked) space on left+top sides

1.0mm margin on all sides

Pattern is Clear

GlobalMulti NEG - Screen Shot 2018-07-23 at 11.22.19 AM.png

Contact_Mark 0.564000 , 0.564000 6.750000 , 9.450000 ImageShift references the center of the contact alignment mark "+"

with 1.1mm margin on all sides

Align Front - Screen Shot 2018-07-23 at 11.32.16 AM.png

Resolution Test Charts

The Resolution test charts are repeated all across the reticle, in order to test for lens aberrations. You can have the system window-off only a single resolution chart, but since they are placed closely together on the reticle, it's very likely that partial shots of adjacent charts will also be exposed.

In addition, the repeating cells allow us to test for the proper optical proximity correction algorithm. The Five Dense_... patterns are for calibrating the OPC algorithm, and are not for user analysis.

Calibration Chart Layout

Cell name is "UCSB_Cal", with coordinates below pointing to center of this cell.

Layout of the repeating calibration charts
Layout of the repeating calibration charts

Resolution Chart Schematic

"resolution_chart_ORIG" cell in the above.

Resolution Chart Layout schematic
Resolution Chart Layout, with res. test from 2.00µm to 0.130µm

The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied:

OPC'd Resolution Chart Layout schematic
OPC'd Resolution Chart Layout, with res. test from 2.0µm to 0.130µm

Coords for "UCSB_Cal" Calibration Patterns

Each of the above "UCSB_Cal" cells, including all 7 patterns, is repeated on the following coordinates across the plate (coords are to the center of the "UCSB_Cal" cell):

Image Size

X , Y

(Wafer, mm)

Image Shift

X

(Wafer, mm)

Image Shift

Y

(Wafer, mm)

2.610000 , 2.610000 -9.450000 12.150000
same as above -6.750000 12.150000
" " -4.050000 12.150000
" " -1.350000 12.150000
" " 1.350000 12.150000
" " 4.050000 12.150000
" " 6.750000 12.150000
" " 9.450000 12.150000
-9.450000 9.450000
Alignment Marker
-4.050000 9.450000
-1.350000 9.450000
1.350000 9.450000
4.050000 9.450000
Alignment Marker
9.450000 9.450000
-9.450000 6.750000
-6.750000 6.750000
-4.050000 6.750000
-1.350000 6.750000
1.350000 6.750000
4.050000 6.750000
6.750000 6.750000
9.450000 6.750000
-9.450000 4.050000
-6.750000 4.050000
-4.050000 4.050000
-1.350000 4.050000
1.350000 4.050000
4.050000 4.050000
6.750000 4.050000
9.450000 4.050000
-9.450000 1.350000
-6.750000 1.350000
-4.050000 1.350000
-1.350000 1.350000
1.350000 1.350000
4.050000 1.350000
6.750000 1.350000
9.450000 1.350000
-9.450000 -1.350000
-6.750000 -1.350000
-4.050000 -1.350000
-1.350000 -1.350000
1.350000 -1.350000
4.050000 -1.350000
6.750000 -1.350000
9.450000 -1.350000
-9.450000 -4.050000
-6.750000 -4.050000
-4.050000 -4.050000
-1.350000 -4.050000
1.350000 -4.050000
4.050000 -4.050000
6.750000 -4.050000
9.450000 -4.050000
-9.450000 -6.750000
-6.750000 -6.750000
-4.050000 -6.750000
-1.350000 -6.750000
1.350000 -6.750000
4.050000 -6.750000
6.750000 -6.750000
9.450000 -6.750000
-9.450000 -9.450000
Alignment Marker
-4.050000 -9.450000
-1.350000 -9.450000
1.350000 -9.450000
4.050000 -9.450000
Alignment Marker
9.450000 -9.450000
-9.450000 -12.150000
-6.750000 -12.150000
-4.050000 -12.150000
-1.350000 -12.150000
1.350000 -12.150000
4.050000 -12.150000
6.750000 -12.150000
9.450000 -12.150000
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