Difference between revisions of "ASML Stepper 3 - UCSB Test Reticles"
(added UCSB-OPC1 and alignment marks for that reticle) |
(added resolution charts + coords etc.) |
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Line 19: | Line 19: | ||
| -6.750000 , 9.450000 |
| -6.750000 , 9.450000 |
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|ImageShift references the center of the -X- "global" mark. |
|ImageShift references the center of the -X- "global" mark. |
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+ | The == |
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− | The ==||| "Local" mark is X+200µm to the right |
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+ | || "Local" mark is X+200µm to the right |
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has 1.1mm margin on all sides |
has 1.1mm margin on all sides |
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Line 45: | Line 46: | ||
1.0mm margin on all sides |
1.0mm margin on all sides |
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|[[File:GlobalMulti NEG - Screen Shot 2018-07-23 at 11.22.19 AM.png|frameless|115x115px]] |
|[[File:GlobalMulti NEG - Screen Shot 2018-07-23 at 11.22.19 AM.png|frameless|115x115px]] |
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+ | |} |
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+ | |||
+ | === Resolution Test Charts === |
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+ | The Resolution test charts are repeated all across the reticle, in order to test for lens aberrations. You can have the system window-off only a single resolution chart, but since they are placed closely together on the reticle, it's very likely that partial shots of adjacent charts will also be exposed. |
||
+ | |||
+ | In addition, the repeating cells allow us to test for the proper [https://en.wikipedia.org/wiki/Optical_proximity_correction optical proximity correction] algorithm. The Five <code>Dense_...</code> patterns are for calibrating the OPC algorithm, and are not for user analysis. |
||
+ | |||
+ | ==== Calibration Chart Layout ==== |
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+ | [[File:UCSB cal - Screen Shot 2018-07-23 at 12.06.58 PM.png|alt=Layout of the repeating calibration charts|none|thumb|512x512px|Layout of the repeating calibration charts]] |
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+ | |||
+ | ==== Resolution Chart Schematic ==== |
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+ | "resolution_chart_ORIG" cell in the above. |
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+ | [[File:Resolution Chart - Screen Shot 2018-07-23 at 1.36.31 PM.png|alt=Resolution Chart Layout schematic|none|thumb|400x400px|Resolution Chart Layout, with res. test from 2.00µm to 0.130µm]] |
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+ | |||
+ | The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied: |
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+ | [[File:Resolution chart OPC - Screen Shot 2018-07-23 at 1.40.48 PM.png|alt=OPC'd Resolution Chart Layout schematic|none|thumb|395x395px|OPC'd Resolution Chart Layout, with res. test from 2.0µm to 0.130µm]] |
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+ | |||
+ | ==== Coords for "UCSB_Cal" Resolution Test Patterns ==== |
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+ | Each of the above cells is repeated on the following coordinates: |
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+ | {| class="wikitable" |
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+ | !Image Size |
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+ | X , Y |
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+ | |||
+ | (Wafer, mm) |
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+ | !Image Shift |
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+ | X |
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+ | |||
+ | (Wafer, mm) |
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+ | !Image Shift |
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+ | Y |
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+ | |||
+ | (Wafer, mm) |
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+ | |- |
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+ | |2.610000 , 2.610000 |
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+ | | -9.450000 |
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+ | |12.150000 |
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+ | |- |
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+ | |same as above |
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+ | | -6.750000 |
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+ | |12.150000 |
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+ | |- |
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+ | | |
||
+ | | -4.050000 |
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+ | |12.150000 |
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+ | |- |
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+ | | |
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+ | | -1.350000 |
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+ | |12.150000 |
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+ | |- |
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+ | | |
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+ | |1.350000 |
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+ | |12.150000 |
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+ | |- |
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+ | | |
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+ | |4.050000 |
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+ | |12.150000 |
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+ | |- |
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+ | | |
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+ | |6.750000 |
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+ | |12.150000 |
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+ | |- |
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+ | | |
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+ | |9.450000 |
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+ | |12.150000 |
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+ | |- |
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+ | | |
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+ | | |
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+ | | |
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+ | |- |
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+ | | |
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+ | | -9.450000 |
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+ | |9.450000 |
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+ | |- |
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+ | |Alignment Marker |
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+ | |– |
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+ | |– |
||
+ | |- |
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+ | | |
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+ | | -4.050000 |
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+ | |9.450000 |
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+ | |- |
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+ | | |
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+ | | -1.350000 |
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+ | |9.450000 |
||
+ | |- |
||
+ | | |
||
+ | |1.350000 |
||
+ | |9.450000 |
||
+ | |- |
||
+ | | |
||
+ | |4.050000 |
||
+ | |9.450000 |
||
+ | |- |
||
+ | |Alignment Marker |
||
+ | |– |
||
+ | |– |
||
+ | |- |
||
+ | | |
||
+ | |9.450000 |
||
+ | |9.450000 |
||
+ | |- |
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+ | | |
||
+ | | |
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+ | | |
||
+ | |- |
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+ | | |
||
+ | | -9.450000 |
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+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -6.750000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.050000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -1.350000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |1.350000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |4.050000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |6.750000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |9.450000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | | |
||
+ | | -9.450000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -6.750000 |
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+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.050000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -1.350000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |1.350000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |4.050000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |6.750000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |9.450000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | | |
||
+ | | -9.450000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -6.750000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.050000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -1.350000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |1.350000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |4.050000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |6.750000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |9.450000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | | |
||
+ | | -9.450000 |
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+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -6.750000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.050000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -1.350000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |1.350000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |4.050000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |6.750000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |9.450000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | | |
||
+ | | -9.450000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -6.750000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.050000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -1.350000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |1.350000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |4.050000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |6.750000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |9.450000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | | |
||
+ | | -9.450000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -6.750000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.050000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -1.350000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |1.350000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |4.050000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |6.750000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |9.450000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | | |
||
+ | | -9.450000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | |Alignment Marker |
||
+ | |– |
||
+ | |– |
||
+ | |- |
||
+ | | |
||
+ | | -4.050000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | | |
||
+ | | -1.350000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | | |
||
+ | |1.350000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | | |
||
+ | |4.050000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | |Alignment Marker |
||
+ | |– |
||
+ | |– |
||
+ | |- |
||
+ | | |
||
+ | |9.450000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | | |
||
+ | | |
||
+ | | |
||
+ | |- |
||
+ | | |
||
+ | | -9.450000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | | -6.750000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.050000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | | -1.350000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | |1.350000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | |4.050000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | |6.750000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | |9.450000 |
||
+ | | -12.150000 |
||
|} |
|} |
Revision as of 03:20, 1 August 2018
Reticle ID: "UCSB-OPC1"
Alignment Markers
Resolution Test Charts
The Resolution test charts are repeated all across the reticle, in order to test for lens aberrations. You can have the system window-off only a single resolution chart, but since they are placed closely together on the reticle, it's very likely that partial shots of adjacent charts will also be exposed.
In addition, the repeating cells allow us to test for the proper optical proximity correction algorithm. The Five Dense_...
patterns are for calibrating the OPC algorithm, and are not for user analysis.
Calibration Chart Layout
Resolution Chart Schematic
"resolution_chart_ORIG" cell in the above.
The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied:
Coords for "UCSB_Cal" Resolution Test Patterns
Each of the above cells is repeated on the following coordinates:
Image Size
X , Y (Wafer, mm) |
Image Shift
X (Wafer, mm) |
Image Shift
Y (Wafer, mm) |
---|---|---|
2.610000 , 2.610000 | -9.450000 | 12.150000 |
same as above | -6.750000 | 12.150000 |
-4.050000 | 12.150000 | |
-1.350000 | 12.150000 | |
1.350000 | 12.150000 | |
4.050000 | 12.150000 | |
6.750000 | 12.150000 | |
9.450000 | 12.150000 | |
-9.450000 | 9.450000 | |
Alignment Marker | – | – |
-4.050000 | 9.450000 | |
-1.350000 | 9.450000 | |
1.350000 | 9.450000 | |
4.050000 | 9.450000 | |
Alignment Marker | – | – |
9.450000 | 9.450000 | |
-9.450000 | 6.750000 | |
-6.750000 | 6.750000 | |
-4.050000 | 6.750000 | |
-1.350000 | 6.750000 | |
1.350000 | 6.750000 | |
4.050000 | 6.750000 | |
6.750000 | 6.750000 | |
9.450000 | 6.750000 | |
-9.450000 | 4.050000 | |
-6.750000 | 4.050000 | |
-4.050000 | 4.050000 | |
-1.350000 | 4.050000 | |
1.350000 | 4.050000 | |
4.050000 | 4.050000 | |
6.750000 | 4.050000 | |
9.450000 | 4.050000 | |
-9.450000 | 1.350000 | |
-6.750000 | 1.350000 | |
-4.050000 | 1.350000 | |
-1.350000 | 1.350000 | |
1.350000 | 1.350000 | |
4.050000 | 1.350000 | |
6.750000 | 1.350000 | |
9.450000 | 1.350000 | |
-9.450000 | -1.350000 | |
-6.750000 | -1.350000 | |
-4.050000 | -1.350000 | |
-1.350000 | -1.350000 | |
1.350000 | -1.350000 | |
4.050000 | -1.350000 | |
6.750000 | -1.350000 | |
9.450000 | -1.350000 | |
-9.450000 | -4.050000 | |
-6.750000 | -4.050000 | |
-4.050000 | -4.050000 | |
-1.350000 | -4.050000 | |
1.350000 | -4.050000 | |
4.050000 | -4.050000 | |
6.750000 | -4.050000 | |
9.450000 | -4.050000 | |
-9.450000 | -6.750000 | |
-6.750000 | -6.750000 | |
-4.050000 | -6.750000 | |
-1.350000 | -6.750000 | |
1.350000 | -6.750000 | |
4.050000 | -6.750000 | |
6.750000 | -6.750000 | |
9.450000 | -6.750000 | |
-9.450000 | -9.450000 | |
Alignment Marker | – | – |
-4.050000 | -9.450000 | |
-1.350000 | -9.450000 | |
1.350000 | -9.450000 | |
4.050000 | -9.450000 | |
Alignment Marker | – | – |
9.450000 | -9.450000 | |
-9.450000 | -12.150000 | |
-6.750000 | -12.150000 | |
-4.050000 | -12.150000 | |
-1.350000 | -12.150000 | |
1.350000 | -12.150000 | |
4.050000 | -12.150000 | |
6.750000 | -12.150000 | |
9.450000 | -12.150000 |