ASML 5500: Recovering from an Error

1. Do NOT exit task streaming!
   1. If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
2. Abort the Batch: Choose the task from the Task List, click Batch > "Abort"
3. In the following popup window, click "Remove Wafers from Litho Cluster"
   1. This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure.
4. Wait for the task status to change from "Aborting" to "Aborted"

Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list.

Please make sure there are no tasks in the "Waiting" state - please abort these tasks before leaving the system, or the next user's wafers will be shot with your job!