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UCSB Nanofab Wiki - Changes related to "ICP Etching Recipes" [en]
2024-03-28T19:53:18Z
Related changes
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Stepper Recipes
2024-03-22T00:03:48Z
<p><span dir="auto"><span class="autocomment">Negative Resist (ASML DUV): </span> UVN dev time</span></p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 00:03, 22 March 2024</td>
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<td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>|Approx. 20sec</div></td>
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John d